薄膜型锑化铟霍尔元件芯片测试系统的设计与实现  

Design and realization of a test system of thin film insb hall element chips

作　　者：欧琳 王静[1] 林兴[1] 惠一恒 赵勇[1] 赖陆屹 胡鹏飞 王广才[1] OU Lin;WANG Jing;LIN Xing;HUI Yiheng;ZHAO Yong;LAI Luyi;HU Pengfei;WANG Guangcai(Institute of Photo-electronics Thin Film Devices and Technique,Key Laboratory of Photoelectronic Thin Film Devices and Technology of Tianjin,Engineering Research Center of Thin Film Optoelectronics Technology,Ministry of Education,Sino-Euro Joint Research Center for Photovoltaic Power Generation of Tianjin,Nankai University,Tianjin 300350,China)

机构地区：[1]南开大学光电子薄膜器件与技术研究所天津市光电子薄膜器件与技术重点实验室薄膜光电子技术教育部工程研究中心天津市中欧太阳能光伏发电技术联合研究中心,南开大学,天津300350

出　　处：《自动化与仪器仪表》2021年第2期93-96,99,共5页Automation & Instrumentation

基　　金：南开大学中央高校基本科研业务费专项资金(No.63181217,63191204);国家高技术研究发展计划(No.2013AA050302)。

摘　　要：针对薄膜型锑化铟霍尔元件芯片性能测试,设计了一套霍尔元件芯片测试系统。系统主要由手动探针台、显微镜、探针卡、外加磁场、PLC以及测试软件组成,可以进行霍尔元件芯片的输入和输出电阻、不平衡电压以及霍尔电压的测试。测试系统稳定性好,重复度高,测试误差较小。手动探针台操作简单,测试方便,灵活性强,可分别测试4英寸硅片和3英寸铁氧体衬底制备的薄膜型锑化铟霍尔元件芯片,以较低成本满足了霍尔元件芯片研发过程中芯片测试的需求。Based on the structure of thin film InSb Hall element chip designed and developed by ourselves,a set of Hall element chip testing system is developed.The system is mainly composed of a microscope,a probe card,a manual probe station,guide rails,applied magnetic field,PLC and testing software,which can test the input and output resistance,unbalanced voltage and Hall voltage of thin film InSb Hall element chips.The system test has good stability,high repetition and small test error.The manual probe station is simple to operate,convenient to test,and highly flexible.It can test thin-film InSb Hall element chips prepared on 4-inch silicon wafers and 3-inch ferrite substrates,respectively,and meets the requirements of chip test requirements during the development of Hall element chips with lower cost.

关 键 词：锑化铟 霍尔元件 芯片 晶圆测试 手动探针台 

分 类 号：TP206[自动化与计算机技术—检测技术与自动化装置] O439[自动化与计算机技术—控制科学与工程]