一种基于MEMS倾角测量仪的设计与验证  

Design and Verification of an Inclinometer Based on MEMS

作　　者：李冰[1] 韩彦东 LI Bing;HAN Yandong(School of Electrical Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China)

机构地区：[1]郑州科技学院电气工程学院,郑州450064

出　　处：《实验室研究与探索》2021年第2期75-79,共5页Research and Exploration In Laboratory

摘　　要：在MEMS传感器的基础上设计并制作了具有大量程、高精度的倾角仪。测量单元采用3个正交的MEMS加速度传感器,在保证测量精度的同时加大了倾角的测量范围。硬件设计分别采用线性电源、高频控制芯片及高分辨率模数转换芯片实现倾角仪的小型化。对倾角仪测量时的测量误差通过建模提出了多位置标定补偿技术、分段式温度补偿技术及现场快速标定技术,实时保证倾角仪具备较高的测量精度。通过三轴温控转台对提出的3种标定方法进行了实验验证,不但证明了3种标定技术的有效性及实用性,且对倾角仪的标定精度均可达0.01°。Aiming at the urgent demand of high precision and large range inclinometers in the market,the inclinometer with large range and high precision is designed and manufactured on the basis of MEMS sensors.First of all,three orthogonal MEMS acceleration sensors are used in the measurement unit,which not only ensures the measurement accuracy,but also increases the measurement range of the tilt angle.The hardware design adopts linear power supply,high frequency control chip and high resolution A/D conversion chip to realize miniaturization of inclinometer.Then,by modeling the measurement error of inclinometer,the multi position calibration compensation technology,segmented temperature compensation technology and on-site fast calibration technology are proposed to ensure that the inclinometer has high accuracy measurement in real time.Finally,the three calibration methods are verified by the three-axis temperature control turntable,which not only proves the effectiveness and practicability of the three calibration technologies,but also the calibration accuracy of the inclinometer can reach 0.01°.

关 键 词：倾角仪 微电子机械系统 高精度 误差补偿 

分 类 号：O436[机械工程—光学工程]