基于Nios Ⅱ的光刻机运动台电机驱动控制系统设计  

Design of Nios Ⅱ based motor drive control system for motion table of lithography machine

作　　者：庞权岗 胡放荣[1] 张文涛[1] 石公含 PANG Quangang;HU Fangrong;ZHANG Wentao;SHI Gonghan(School of Electronic Engineering and Automation,Guilin University of Electronic Technology,Guilin 541004,China;Shanghai Microelectronics Equipment(Group)Co.,Ltd.Shanghai 201213,China)

机构地区：[1]桂林电子科技大学电子工程与自动化学院,广西桂林541004 [2]上海微电子装备(集团)股份有限公司,上海201213

出　　处：《桂林电子科技大学学报》2020年第6期498-504,共7页Journal of Guilin University of Electronic Technology

基　　金：国家自然科学基金(11574059);广西自然科学基金(2018GXNSFAA050043);国家科技重大专项(2017ZX02101007-003);广西自动检测技术与仪器重点实验室基金(YQ16101)。

摘　　要：为了给光刻机运动台控制系统架构升级提供可靠方案,设计了基于Nios Ⅱ的光刻机运动台电机驱动控制系统。采用FPGA内嵌Nios Ⅱ软核,通过Quartus Ⅱ软件中的Qsys和功能平台Nios ⅡSBT实现电机驱动控制系统硬件电路和软件程序设计。内核部分采用嵌入式多核CPU实现数据并行运算,以提升控制系统的数据处理能力。实验结果表明,该控制系统能够稳定控制电机运转达到预期的驱动效果,验证了该控制系统方案的可行性。In order to provide a scheme for the upgrade of the motion control system of the lithography machine motion table,a Nios II based motor drive control system is designed.The control system uses the Nios II soft core embedded in the Field-Programmable Gate Array FPGA,and realizes the hardware circuit and software program design of the motor drive control system by using the Qsys in the Quartus II software and the Nios II SBT.The kernel part uses embedded multi-core CPU to realize data parallel computing,which can improve the data processing capability of the control system.The experimental results show that the control system can stably control the motor drive motor to achieve the expected driving effect,and verify the feasibility of the control system scheme.

关 键 词：NiosⅡ软核 电机驱动 控制 FPGA 架构升级 光刻机 

分 类 号：TP272[自动化与计算机技术—检测技术与自动化装置]