一种压电驱动互屏蔽电极MEMS电场传感器  

Piezoelectric driven MEMS electric field sensor with mutual shielding electrodes

作　　者：雷虎成 夏善红 彭春荣 储昭志 张洲威 刘俊 张巍 LEI Hucheng;XIAShanhong;PENG Chunrong;CHU Zhaozhi;ZHANG Zhouwei;LIU Jun;ZHANGWei(State Key Laboratory of Transducer Technology,Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100190,China;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029)

机构地区：[1]中国科学院空天信息创新研究院传感技术联合国家重点实验室,北京100190 [2]中国科学院大学电子电气与通信工程学院,北京100049 [3]中国科学院微电子研究所,北京100029

出　　处：《微纳电子与智能制造》2020年第4期52-58,共7页Micro/nano Electronics and Intelligent Manufacturing

基　　金：国家重点研发计划(2018YFF01010800)项目资助。

摘　　要：为了提高传感器的敏感性能并降低功耗,提出一种压电驱动互屏蔽电极微机电(micro electro mechanical systems,MEMS)电场传感器。该传感器基于电荷感应原理,敏感单元主要由固定电极和压电驱动的可动电极组成,固定电极和可动电极都作为感应电极,同时它们又互为屏蔽电极。通过可动电极的振动来周期性地调制可动电极和固定电极上的电场分布及感应电荷量,从而产生感应电流。仿真结果表明,压电驱动层在低驱动电压下可获得较大位移;与常见的接地屏蔽电极MEMS电场敏感单元相比,所提出的电场敏感结构设计有效地增加了电极感应面积,增大了感应电荷变化量,增强了传感器的电流输出信号。研究了MEMS工艺流程,采用溶胶凝胶法制备出PZT压电薄膜材料。In order to improve the sensitivity of the sensor and reduce the power consumption,a piezoelectric driven MEMS electric field sensor(MEFS)with mutual shielding electrodes is proposed.Based on the charge-induction principle,the sensitive unit is mainly composed of fixed electrodes and piezoelectric driven movable electrodes.All the fixed and movable electrodes are sensing electrodes,and in the mean time,they are mutually shielding electrodes.The movable electrodes are driven to periodically modulate the electric field distribution and the induced charge on the movable electrodes and the fixed electrodes,and the induced currents are generated simultaneously.Simulation results show that the piezoelectric actuator has a large displacement that can be obtained under low driving voltage,and compared with the sensitive unit of common MEFS with grounded shielding electrodes,the sensitive structure design of the proposed MEFS with mutual shielding electrodes effectively increases the electrode sensing area,thus increasing the quantity of induced charge change and the current output signal of the sensor.The MEFS process is studied,and the piezoelectric material PZT is prepared by the sol-gel method.

关 键 词：压电驱动 互屏蔽电极 MEMS 电场传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]