基于双稳态势能调节的仿生纤毛流速传感器  

Biomimetic Hair Flow Sensor Based on Bi-stable Potential Energy Adjustment

作　　者：梁贺龙 刘武[1] 许海军 訾鹏 LIANG Helong;LIU Wu;XU Haijun;ZI Peng(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiaotong University,Shanghai 200240,CHN;Department of Micro/Nano Electronics,Shanghai Jiaotong University,Shanghai 200240,CHN)

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学微纳电子学系,上海200240

出　　处：《半导体光电》2021年第1期30-34,共5页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61871266);青岛海洋科学与技术国家实验室开放基金项目(QNLM2016ORP0404);上海市自然科学基金项目(17ZR1414500);航空科学基金项目(2016ZD57006);上海市科委专业技术服务平台项目(19DZ2291103)。

摘　　要：针对流速传感器的高分辨率需求,提出了一种基于双稳态势能调节的仿生纤毛流速传感器。该传感器由纤毛、电极层、上部结构层、中间连接层和下部支撑层等多层结构构成,其中上部结构层一方面采用不对称梳齿结构实现差分电容检测,另一方面布置周期性调制梳齿实现系统势能函数呈现双稳态。通过流体-固体力学-静电多物理场耦合分析,得到电容随流速的变化关系,分辨率优于0.001m/s,另外通过调制梳齿的静电场分析,绘制出系统势能函数曲线。最后,基于MEMS加工技术,通过设计合理的工艺流程制备出了该传感器。In order to enhance the resolution of the flow sensor,a biomimetic hair flow sensor based on bi-stable potential energy adjustment is proposed.The sensor is mainly composed of hair,electrode layer,top structure layer,middle connecting layer and bottom supporting layer.On the one hand,the top structure layer adopts asymmetric comb fingers to realize differential capacitance detection;on the other hand,periodic modulated comb fingers are arranged to realize bi-stable potential energy function of the system.Through the fluid-solid mechanical-electrostatic multi-physical field coupling analysis,the relation of capacitance changing with the air velocity was obtained,and the resolution was better than 0.001 m/s.In addition,the potential energy function curve of the system was drawn through the electrostatic field analysis of the modulated comb fingers.Finally,based on MEMS processing technology,a reasonable process was designed and the sensor was manufactured.

关 键 词：MEMS 双稳态 电容 纤毛 流速传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]