硅锭电火花线切割对称式张力控制研究  

Research on Symmetrical Tension Control of Silicon Ingot Wire EDM

作　　者：刘鹏[1] 罗福源[1] 孙凌云 LIU Peng;LUO Fuyuan;SUN Lingyun(College of Mechanic and Electronic Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《机械与电子》2021年第4期53-58,共6页Machinery & Electronics

基　　金：江苏省自然科学基金优秀青年基金项目(BK20160084);南京市产学研后补助项目资助(201722014)。

摘　　要：针对半导体材料电火花加工过程中加工区域电极丝张力波动的现象,从数学模型的角度指出了传统的非对称式单边张力控制策略的不足,提出了一种新型的对称式双边张力控制方案,并给出基于此方案进行“分时切换控制”的具体实施流程,建立了张力控制系统数学模型,采用PID控制方法对对称式双边张力控制系统进行仿真。仿真结果表明,此控制方案在分时切换瞬间可以在30 ms内完成对目标值的快速追踪,并且超调量控制在5%以内。进行了恒张力控制对比实验。实验结果表明,此方案所得的张力波动率仅为非对称式单边控制方案的50%,改善了加工区域的张力波动情况,解决了因走丝方向不同导致的加工区域张力不一致的问题。Aiming at the phenomenon of wire tension fluctuations in the machining area during the EDM of semiconductor materials,the shortcomings of the traditional asymmetric unilateral tension control strategy are pointed out from the perspective of the mathematical model,and a new symmetric bilateral tension control scheme is proposed.The specific implementation process of“timesharing switching control”based on this scheme is given;the mathematical model of tension control system is established,and the PID control method is used to simulate the symmetrical bilateral tension control system.The simulation results show that this control scheme can quickly track the target value within 30 ms at the moment of timesharing switching,and the overshoot is controlled within 5%.A constant tension control comparison experiment was carried out.The experimental results show that the tension fluctuation rate obtained by this scheme is only 50%of the asymmetric unilateral control scheme,which greatly improves the tension fluctuation in the processing area and solves the problem of inconsistent tension in the processing area caused by the different threading directions.

关 键 词：张力波动 双边张力控制 分时切换 PID控制 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]