基于磁控溅射的石英谐振器升频微调技术  

Research on Trimming Frequency Upward Technology of Quartz Resonatorby Using Magnetron Sputtering

作　　者：杨秀涛 张骏淋 周彪 王文武[1] 曾广根[1] YANG Xiutao;ZHANG Junlin;ZHOU Biao;WANG Wenwu;ZENG Guanggen(College of Materials Science and Engineering, Sichuan University, Chengdu 610064, China)

机构地区：[1]四川大学材料科学与工程学院,四川成都610064

出　　处：《压电与声光》2021年第2期248-253,共6页Piezoelectrics & Acoustooptics

基　　金：四川大学-泸州市人民政府战略合作基金资助项目(2019CDLZ-15);2020年四川大学实验技术基金资助项目(重点项目2020-8);四川省人社厅留学回国人员科技活动基金资助项目(201814502);四川省2018-2020年高等教育人才培养质量和教学改革基金资助项目(JG2018-44);中央高校基本科研业务费专项基金资助项目。

摘　　要：石英晶体谐振器(QCR)是现代电子行业领域中一种不可缺少的电子元器件。通过计算并沉积不同形状及厚度的电极在具有某一基准频率的石英晶片上,即可得到所需目标频率。受镀膜设备、掩膜板、晶体尺寸及镀膜位置等因素的影响,很难精确地一次性得到目标频率,特别是对于批量生产的石英谐振器,要获得一致性很好的频率更难,因此,后期的频率微调很重要。频率微调法包括物理法和化学法,一般通过改变石英晶片或电极的质量来实现升频或降频。该文首先综述了激光刻蚀和离子束刻蚀物理法升频技术,然后结合相关技术的发展,在论证可行性的基础上,创新性地提出使用磁控溅射技术进行升频微调,并建立了理论模型。The quartz crystal resonator(QCR)is an indispensable electronic component in the modern electronic industry.By calculating and depositing electrodes of different shapes and thicknesses on a quartz wafer with a certain reference frequency,the desired target frequency can be obtained.However,due to the influence of coating equipment,mask,crystal size and coating position,it is difficult to accurately obtain the target frequency at one time;especially for mass-produced quartz resonators,it is more difficult to obtain a consistent frequency.Therefore,the frequency trimming is very important in the later stage.The frequency trimming method includes physical method and chemical method.Generally,the frequency upward or downward is realized by changing the weight of quartz wafer or electrode.In this paper,the frequency upward technique based on the laser etching and ion beam etching physical trimming method is reviewed,and then a trimming frequency upward technology of QCR by using magnetron sputtering has been proposed innovatively and a theoretical model is established by combining the development of related technology and on the basis of feasibility demonstration.

关 键 词：电极 磁控溅射 升频微调 石英晶体谐振器 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]