聚焦离子束系统虚拟仿真实验项目的建设与教学  

Construction and Teaching of Virtual Simulation Experiment Platform of Focused Ion Beam System

作　　者：张朋波 张映辉 付姚 陈宝玖 刘开颖 刘伟 殷燕 李香萍 夏文文 邢明铭 盛德元 张秋红 薛晓红 ZHANG Pengbo;ZHANG Yinghui;FU Yao;CHEN Baojiu;LIU Kaiying;LIU Wei;YIN Yan;LI Xiangping;XIA Wenwen;XING Mingming;SHENG Deyuan;ZHANG Qiuhong;XUE Xiaohong(College of Science,Dalian Maritime University,Dalian 116026,China)

机构地区：[1]大连海事大学理学院,辽宁大连116026

出　　处：《大学物理实验》2021年第1期117-122,共6页Physical Experiment of College

基　　金：2019教育部高等学校教学研究项目(DJZW201904db);2020年大连海事大学教学改革项目(2020Y96);大连海事大学2020年教师发展专题立项(JF2020Y10)。

摘　　要：主要对聚焦离子束系统虚拟仿真实验教学项目的建设和教学实践进行了总结和探讨。本实验针对扫描电子显微镜观测和离子束刻蚀沉积的相关实验内容在本科教学中难以真实实现的现状,开发了聚焦离子束系统仿真实验,能够开展样品制备和装载、扫描电子显微镜观测样品、离子束刻蚀和沉积、图像采集和图像处理系列仿真实验。实验教学活动中明显突出了学生的主体性以及学生综合素质和创新能力的培养,用于实验教学后,受到学生好评,选课人数多,已获评国家级虚拟仿真实验教学一流课程。It mainly summarizes and discusses the construction and teaching practice of the virtual simulation experiment teaching project of the focused ion beam system.Aiming at the current situation that the relevant experimental content of scanning electron microscope observation and ion beam etching deposition is difficult to be realized in undergraduate teaching,we have developed a focused ion beam system simulation experiment,which can carry out sample preparation and loading,scanning electron microscope observation of samples,ion beam etching and deposition,image acquisition and image processing series of simulation experiments.The experimental teaching activities clearly highlight the student’s subjectivity and the cultivation of students’comprehensive quality and innovation ability.After being used in experimental teaching,it has been well received by students and has a large number of selected courses.It has been awarded the first-class course of national virtual simulation experiment teaching.

关 键 词：聚焦离子束系统 大学物理实验 实验教学 教学改革 

分 类 号：G642[文化科学—高等教育学]