基于MSC的低量程SAW压力传感器研究  

Study of Low-range SAW Pressure Sensor Based on MSC

作　　者：杨刚 李媛媛[1] 曹乐 江蓓 季雪咪 YANG Gang;LI Yuan-yuan;CAO Le;JIANG Bei;JI Xue-mi(School of Electronic and Electrical Engineering,Shanghai University of Engineering Science,Shanghai 201620,China)

机构地区：[1]上海工程技术大学电子电气工程学院,上海201620

出　　处：《仪表技术与传感器》2021年第5期1-5,9,共6页Instrument Technique and Sensor

摘　　要：随着声表面波(SAW)传感器在低量程压力检测领域的应用,其测量精确度的要求随之提高。针对SAW传感器频率响应曲线旁瓣扰动过大和体声波(BAW)干扰的问题,研究设计了一种基于多条耦合器(MSC)的低量程SAW压力传感器。围绕SAW传感器设计原理,将输入输出叉指换能器(IDT)均采用余弦平方函数加权设计能有效减少频率响应的旁瓣扰动。根据声表面波传播原理,利用MSC的设计以过滤BAW干扰。通过对传感器的实验测试,表明了该传感器在实现低量程压力检测方面具有可行性。同时对于旁瓣和BAW的干扰具有一定抑制作用。With the application of surface acoustic wave(SAW)sensors in the low-range pressure detection field,the measurement accuracy requirements have increased.For the problems of excessive sidelobe perturbation and bulk acoustic wave(BAW)interference of the frequency response curve,a low-range SAW pressure sensor based on multiple couplers(MSC)was designed.Based on the design principle of the SAW sensor,the input and output interdigital transducer(IDT)was weighted by the cosine square function to effectively reduce the sidelobe disturbance of the frequency response.According to the principle of surface acoustic wave propagation,the design of MSC was used to filter BAW interference.The experimental test of the sensor shows that the sensor is feasible in realizing low-range pressure detection.At the same time,it has a certain suppression effect on the sidelobe and BAW interference.

关 键 词：低量程压力 声表面波 多条耦合器 旁瓣 体声波 叉指换能器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]