蝶翼式振动加速度传感器设计与制造  

Design and manufacture of butterfly vibration acceleration sensor

作　　者：李凯 单恒 蒲金飞 陈伟琪 吴学忠[1] 侯占强[1] LI Kai;SHAN Heng;PU Jinfei;CHEN Weiqi;WU Xuezhong;HOU Zhanqiang(College of Intelligent Science,National University of Defense Technology,Changsha 410073,China;TangZhi Science and Technology Hunan Development Co Ltd,Changsha 410007,China)

机构地区：[1]国防科技大学智能科学学院,湖南长沙410073 [2]唐智科技湖南发展有限公司,湖南长沙410007

出　　处：《传感器与微系统》2021年第6期60-62,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51505490)。

摘　　要：针对故障诊断与安全监测的应用需求,设计了一种大量程、体积小、高谐振频率的蝶翼式振动加速度传感器。通过COMSOL有限元分析(FEA)对敏感结构进行了分析与优化设计。采用了基于绝缘体上硅(SOI)圆片的敏感结构制造工艺完成了敏感结构的加工,将敏感结构与信号检测电路进行了集成,并与传感器结构件进行了封装,完成了蝶翼式加速度传感器的制造。最终,对蝶翼式振动加速度传感器的灵敏度、灵敏度误差、谐振频率等主要性能指标进行了测试。A butterfly vibration acceleration sensor with wide-range, small volume and high resonance frequency, aiming at the application requirements of fault diagnosis and safety monitoring.The specific dimensions of the sensitive structure are simulated and optimized based on the finite element analysis(FEA) software of COMSOL.The accelerometer sensitive structure is fabricated by the SOI wafer.Then the sensitive structure and the signal detecting circuit are integrated and encapsulated by the sensor package part.Finally, the main performance of the sensor are characterized including sensitivity, sensitivity error, resonance frequency, etc.

关 键 词：振动传感器 加速度 蝶翼式 微机械加工 集成封装 

分 类 号：TN305[电子电信—物理电子学]