一种用于引线键合工艺的自动在线检测技术  

Automatic On-line Inspection Technology for Wire Bonding Process

作　　者：李茂松[1] 胡琼[1] 朱虹姣[1] LI Maosong;HU Qiong;ZHU Hongjiao(Sichuan Institute of Solid-State Circuits,China Electronics Technology Group Corp.,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060

出　　处：《电子与封装》2021年第6期31-35,共5页Electronics & Packaging

摘　　要：详细论述了引线键合在线自动检测技术原理及实现方法,分析了影响检测准确性的因素,并提出了相应的解决措施。基于机器视觉系统,提出了一种金丝球焊键合在线自动检测法,通过对键合引线形成的二维图像进行数字化处理,实现了对键合引线连接正确性、植球完整性、焊球直径、引线断裂、偏移、塌陷等缺陷的在线检测。该技术使用机器自动检测代替人工检测,使检测效率提升了80%左右,检测准确率达到100%。The principle and implementation method of wire bonding automatic on-line inspection technology are discussed in detail,the factors affecting the inspection accuracy are analyzed,and the corresponding solution methods are proposed.Based on the machine vision system,an on-line automatic method of gold wire ball bonding is proposed.Through the digital processing of the two-dimensional image formed by the bonding wire,online inspecting the correctness of bonding wire,the completeness of the bonding ball,the diameter of the ball,defects such as bonding wire flying-off,offset and collapse of the wire is realized.This technology uses machine automatic inspection instead of manual inspection,which improves the inspection efficiency about eighty percent and the inspection accuracy reached perfection.

关 键 词：自动检测 在线检测 金丝球焊检测 机器视觉系统 

分 类 号：TN405[电子电信—微电子学与固体电子学]