掩模制造用量测设备工件台结构研究  

Research on the Worktable Structure of a Measuring Equipment for IC Mask Manufacturing

作　　者：华卫群 尤春 薛文卿 HUA Weiqun;YOU Chun;XUE Wenqing(Wuxi Zhongwei Mask Electronics Co.,Ltd.,Wuxi 214135,China)

机构地区：[1]无锡中微掩模电子有限公司,江苏无锡214135

出　　处：《电子与封装》2021年第6期59-63,共5页Electronics & Packaging

摘　　要：高精密量测机台在量测过程中,温度波动和支撑地板震动均会影响量测精度。选用合适的量测设备、工件台材料以减弱温度波动的影响,选用装备减震功能的部件以提高量测工件台的平稳性,采用气悬浮移动工作平台减少摩擦力以提升量测精度。量测设备工件台结构和零部件组合的几何精度分析结果表明,高精密量测机台的水平/垂直直线性上移动小于2μm,气悬浮平台的悬浮间隙误差小于1μm。During the measurement process of high precision measuring tool,temperature fluctuation and vibration of supporting floor will affect the measurement accuracy.First of all,this paper selects the appropriate measuring equipment and material to reduce the influence of temperature fluctuation.Secondly,the components equipped with damping function are selected to improve the stability of the measuring worktable.Thirdly,the air suspension mobile platform is used to reduce the friction and improve the measurement accuracy.Finally,the geometric accuracy analysis results of the structure and parts combination of the measuring equipment show that the horizontal/vertical linear movement of the high-precision measuringmachine is less than 2μm,and the suspension gap error of the air suspension platform is less than 1μm.

关 键 词：量测设备 工件台 花岗岩基座 气浮导轨 微晶玻璃 

分 类 号：TN305.7[电子电信—物理电子学]