金属烧结滤芯用于多晶硅氯硅烷净化放大研究  

Pilot study on metal sintered filter element for purifying chlorosilane in polysilicon production

作　　者：刘见华 万烨[1,2,3] 赵雄 赵宇[1,3] 周勇毅 严大洲[1,2,3] LIU Jian-hua;WAN Ye;ZHAO Xiong;ZHAO Yu;ZHOU Yong-yi;YAN Da-zhou(China Silicon Corporation Ltd.,Luoyang 471000,China;China ENFI Engineering Corporation,Beijing 100038,China;National Engineering Laboratory of Polysilicon Manufacturing Technology,Luoyang 471000,China)

机构地区：[1]洛阳中硅高科技有限公司,河南洛阳471000 [2]中国恩菲工程技术有限公司,北京100038 [3]多晶硅制备技术国家工程实验室,河南洛阳471000

出　　处：《现代化工》2021年第7期231-233,共3页Modern Chemical Industry

摘　　要：采用金属粉末烧结滤芯对多晶硅制备干法回收工序的氯硅烷进行中试净化研究,在相同过滤精度和面积下,对比处理量对初始过滤压降和不同滤饼剥离方式对剥离率的影响。结果表明,当原料颗粒浓度为235 g/m^(3)、采用液相反冲滤饼剥离方式时,出口颗粒平均浓度为2.1 g/m^(3),过滤效率为99.1%。Metal powder sintered filter element is utilized to perform pilot study on purification of chlorosilane in dry recovery section of polysilicon production.Under the same filtration precision and area,the influence of treatment amount on initial filter pressure drop is compared with the influence of different stripping method for filter cake on the stripping rate.Results show that outlet dust concentration is 2. 1 g·m^(-3) and filtration efficiency is 99. 1% when the entrance dust concentration is 235 g·m^(-3) and liquid phase back wash filter cake stripping method is employed.

关 键 词：金属烧结滤芯 氯硅烷 过滤 多晶硅 

分 类 号：TQ127.2[化学工程—无机化工]