Optical screw-wrench for microassembly  

作　　者：Jannis Köhler Sarah Isabelle Ksouri Cemal Esen Andreas Ostendorf 

机构地区：[1]Applied Laser Technologies,Ruhr-Universität Bochum,Universitätsstraße 150,Bochum 44801,Germany

出　　处：《Microsystems & Nanoengineering》2017年第1期389-395,共7页微系统与纳米工程（英文）

基　　金：We thank the German Research Foundation DFG(Deutsche Forschungsgesellschaft)for their generous support within the Reinhardt Koselleck project(OS 188/28-1).

摘　　要：For future micro-and nanotechnologies,the manufacturing of miniaturized,functionalized,and integrated devices is indispensable.In this paper,an assembly technique based on a bottom-up strategy that enables the manufacturing of complex microsystems using only optical methods is presented.A screw connection is transferred to the micrometer range and used to assemble screwand nut-shaped microcomponents.Micro-stereolithography is performed by means of two-photon polymerization,and microstructures are fabricated and subsequently trapped,moved,and screwed together using optical forces in a holographic optical tweezer set-up.The design and construction of interlocking microcomponents and the verification of a stable and releasable joint form the main focus of this paper.The assembly technique is also applied to a microfluidic system to enable the pumping or intermixing of fluids on a microfluidic chip.This strategy not only enables the assembly of microcomponents but also the combination of different materials and features to form complex hybrid microsystems.

关 键 词：holographic optical tweezer MICROASSEMBLY MICROFABRICATION MICROFLUIDICS optical assembly screw connection screw-wrench two-photon polymerization 

分 类 号：TN3[电子电信—物理电子学]