空间三自由度微定位平台设计及优化  

Design and optimization of spatial 3-DOF micro-positioning platform

作　　者：李长齐[1] 王菡[1] 罗昊 LI Changqi;WANG Han;LUO Hao(School of Information Science and Engineering,Baoshan University,Baoshan 678000,China;University Putra Malaysia,Kuala Lumpur 43400,Malaysia)

机构地区：[1]保山学院信息学院,云南保山678000 [2]马来西亚博特拉大学,马来西亚吉隆坡43400

出　　处：《传感器与微系统》2021年第8期65-67,72,共4页Transducer and Microsystem Technologies

基　　金：云南省教育厅科学研究基金资助项目(2020J0699)。

摘　　要：耦合位移直接影响微定位平台输出精度。控制空间微定位平台耦合位移可以有效提高平台的输出精度。通过控制误差补偿的方式消除微定位平台耦合位移,平台的驱动方式采用压电驱动。基于卡氏定理计算出微定位平台输出端输出位移;利用ANSYS软件对微定位平台的柔性铰链进行尺寸优化,并对优化后的微定位平台进行仿真分析。最后,对理论计算数值和仿真分析数值进行对比。通过对微定位平台的研究,得出所设计平台具有高定位精度,低耦合位移,大行程的优势,为同类微定位平台的研究提高借鉴。Coupling displacement directly affects the output precision of the micro-positioning platform.Controlling the coupling displacement of the spatial micro-positioning platform can effectively improve the output accuracy of the platform.Use control error compensation to eliminate the coupling displacement of the micro-positioning platform.The driving method of the platform is piezoelectric drive.The output displacement of the micro-positioning platform’s output is calculated based on the Karnofsky’s theorem;the size of the flexible hinge of the micro-positioning platform is optimized using ANSYS software,and the optimized micro-positioning platform is simulated and analyzed.Finally,the theoretical calculation value and the simulation analysis value are compared.Through the research of the micro-positioning platform,it is concluded that the platform has the advantages of high positioning accuracy,low coupling displacement and large stroke,which can be used as a reference for the research of similar micro-positioning platforms.

关 键 词：微定位平台 位移放大 耦合位移 有限元分析 误差补偿 

分 类 号：TH112[机械工程—机械设计及理论] TP212[自动化与计算机技术—检测技术与自动化装置]