扭摆式MEMS电容加速度计动态性能分析  

Analysis on Dynamic Performance of Torsional MEMS Capacitive Accelerometer

作　　者：齐志华[1] 张志勇 QI Zhihua;ZHANG Zhiyong(The 13th Research Institute,CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微处理机》2021年第4期33-37,共5页Microprocessors

摘　　要：针对扭摆式MEMS电容加速度计的结构及功能特点,建立系统特征模型,从检测质量、弹性梁、固定端和检测电极等方面详细探讨器件工作原理及动态性能,并通过数学推导得出系统刚度、转动惯量、扭转系数和阻尼系数的解析公式。针对一组特定的结构参数,在气体压强为1标准大气压和100Pa时,对具有不同厚度薄膜气体的系统动态性能进行分析。探讨不同气体压强条件下对应的阻尼状态及其对动态性能的影响。实验最终得到该MEMS器件获得最佳动态响应特性时对应的压强值与气体薄膜厚度值。According to the structural and functional characteristics of MEMS capacitive accelerometer,the system characteristic model is established,and the working principle and dynamic performance of the device are discussed in detail from the aspects of proof-mass,elastic beam,anchor and electrode,and the analytical formulas of system stiffness,moment of inertia,torsion coefficient and damping coefficient are obtained by mathematical derivation.According to a set of specific structural parameters,the dynamic performance of the system with different thickness of thin film gas is analyzed when the gas pressure is 1 standard atmospheric pressure and 100Pa.The corresponding damping state under different gas pressure conditions and its influence on dynamic performance are discussed.Finally,the corresponding pressure value and gas film thickness value when the MEMS device obtains the best dynamic response characteristics are obtained by experiments.

关 键 词：MEMS器件 扭摆式加速度计 压膜阻尼 雷诺方程 动态性能 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]