基于纳秒激光的金属薄膜微加工技术分析与实验研究  

Analysis and Experimental Study of Metal Film Micromachining Technology Based on Nanosecond Laser

作　　者：曹歧平[1] CAO Qiping(Department of CNC Technology,Baotou Vocational&Technical College,Baotou Inner Mongolia 014035,China)

机构地区：[1]包头职业技术学院数控技术系,内蒙古包头014035

出　　处：《机床与液压》2021年第16期67-70,75,共5页Machine Tool & Hydraulics

摘　　要：针对金属薄膜加工中材料热变形大、加工质量差等问题,提出基于纳秒激光的微加工技术。对激光加工汽化机制及热传导理论进行分析;以铝箔为例建立ABAQUS本构模型,对其热变形规律进行仿真分析;基于纳秒激光实验台对钛合金薄膜进行刻划实验,研究不同加工参数对工件表面质量的影响规律。结果表明:在激光加载初期,脉冲激光对材料汽化作用较为明显;随着激光加载时间的延长,热影响区域逐渐增大;沟槽深度随着热源移动速度的增加而逐渐降低,随着激光功率的增加而逐渐变大;仿真和实验结果的平均误差不超过5%。研究结果有助于纳秒激光加工技术的发展。In order to solve the problems of large thermal deformation and poor processing quality in metal film processing,a micromachining technology based on nanosecond laser was proposed.The vaporization mechanism and heat conduction theory of laser processing were analyzed;taking aluminum foil as an example,the ABAQUS constitutive model was established,and the thermal deformation law was simulated and analyzed;based on the nanosecond laser experimental platform,the aluminum foil was engraved to study the influence of different processing parameters on the surface quality of the workpiece.The results show that in the early stage of laser loading,the effect of pulsed laser on the vaporization of the material is more obvious;with the increase of laser loading time,the heat affected area increases gradually;the groove depth decreases gradually with the increase of heat source moving speed,and increases gradually with the increase of laser power;the average error of simulation and experiment is less than 5%.The research results are helpful to the development of the nanosecond laser processing technology.

关 键 词：纳秒激光 金属薄膜 刻划工艺 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]