石墨烯场效应管传感器关键工艺虚拟仿真实验建设  

Construction of Virtual Simulation Experiment for the Key Technology of Graphene FET Sensor

作　　者：栗军 刘汉平 许士才 Li Jun;Liu Hanping;Xu Shicai(College of Physics and Electronic Information,Dezhou University,Dezhou 253023,China;Shandong Key Laboratory of Biophysics,Dezhou University,Dezhou 253023,China)

机构地区：[1]德州学院物理与电子信息学院,山东德州253023 [2]德州学院山东省生物物理重点实验室,山东德州253023

出　　处：《中国现代教育装备》2021年第15期31-34,共4页China Modern Educational Equipment

基　　金：国家自然科学基金项目“用于定量分析的石墨烯/金属纳米阵列增强拉曼基底的研究”(编号:11604040);山东省本科高校教学改革研究项目“基于成果导向教育理念的物联网工程专业人才培养方案的设计与实施”(C2016M021);泰山学者青年项目(编号:tsqn201812104);山东省高等学校优秀青年创新团队项目“基于石墨烯增强拉曼分子相互作用实时检测”(编号:2019KJJ017);德州学院2018年校级教学改革项目重点项目“新工科背景下基于成果导向教育理念的Linux课程教学探索与实现”(编号:JG2018011)。

摘　　要：科教融合,利用现代信息技术,把实验室高水平科研成果转化为虚拟仿真实验教学资源,开发了石墨烯场效应管传感器关键工艺虚拟仿真实验。该实验实现了甲烷气体生长为石墨烯、石墨烯演变为场效应管器件及最终实现传感功能等完整工艺流程,实验内容丰富,涉及多个学科的知识,有助于培养学生多学科交叉思维的意识和能力。Based on the idea of integrating research and teaching that the high-level scientific research experiments are transformed into virtual simulation experiment as teaching resources via modern information technology,a virtual simulation experiment for the key technology of graphene FET sensor is built.The whole experimental process of graphene FET sensor is realized via simulating the real operation scene,including the growth of methane gas into graphene,the evolution of graphene into FET sensor device and the ultimate realization of sensing function.The experimental content is rich,involving knowledge of many disciplines.It is helpful to cultivate students'consciousness and ability of interdisciplinary thinking.

关 键 词：石墨烯 虚拟仿真 实验教学 学科交叉 

分 类 号：G642.423[文化科学—高等教育学] TP212-4[文化科学—教育学]