Monte Carlo method in optical atomic force microscopy  

光学原子力显微镜中的蒙特卡罗方法

作　　者：Ahemd ElMelegy Sarwat Zahwi Ahmed ElMelegy;Sarwat Zahwi(国家标准研究所工程与表面计量实验室,埃及吉萨12211)

机构地区：[1]Engineering and Surface Metrology Laboratory, National Institute of Standards (NIS), Giza, 12211, Egypt

出　　处：《Journal of Measurement Science and Instrumentation》2021年第3期267-271,共5页测试科学与仪器（英文版）

基　　金：National Institute of Standards(NIS),11211,Egypt。

摘　　要：Scanning probe microscopy(SPM)is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen.Atomic force microscopy is one of the SPM family which is considered as a very versatile tool for surface imaging and measurements.A wide range of various samples can be measured regardless of being conductive,no-conductive,in vacuum,in air or in a fluid as a unique feature.One of the most challenges in atomic force microscopes(AFMs)is to evaluate the associated uncertainty during the surface measurements by AFMs.Here,an optical AFM is calibrated through the calibration of XYZ stage.The approach is to overcome difficulties experienced when trying to evaluate some uncertainty components which cannot be experimentally determined i.e.tip surface interaction forces and tip geometry.The Monte Carlo method is then used to determine the associated uncertainties due to such factors by randomly drawing the parameters according to their associated tolerances and their probability density functions(PDFs).The whole process follows supplement 2 to“the guide to the expression of the uncertainty in measurement”(GUM).The approach validated in the paper shows that the evaluated uncertainty in AFM is about 10 nm.

关 键 词：MEASUREMENT Monte Carlo method atomic force microscope(AFM) NANOMETROLOGY 

分 类 号：G63[文化科学—教育学]