基于印刷双层电极的氧化物薄膜晶体管  

Oxide thin-film transistors based on printed double-layer electrodes

作　　者：林奕龙 陈思婷[1] 吴永波 兰林锋[1] 彭俊彪[1] LIN Yi-long;CHEN Si-ting;WU Yong-bo;LAN Lin-feng;PENG Jun-biao(State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, China)

机构地区：[1]华南理工大学发光材料与器件国家重点实验室,广东广州510640

出　　处：《液晶与显示》2021年第9期1239-1246,共8页Chinese Journal of Liquid Crystals and Displays

基　　金：国家自然科学基金(No.62022034,No.22090024)。

摘　　要：为满足印刷显示的大面积制备、低信号延迟的需求,有必要开发应用于氧化物薄膜晶体管(TFTs)的低电阻印刷电极。研究发现喷墨打印Ag和氧化物有源层的界面接触特性较差,导致基于Ag电极的氧化物TFT性能很差。通过在Ag电极和有源层中间插入喷墨打印的氧化铟锡(ITO)电极,可以阻隔Ag纳米颗粒扩散入有源层。此外,ITO电极可以与Ag和有源层形成良好的接触特性,大幅降低了接触电阻。基于Ag/ITO双层电极的TFT较基于单层Ag电极的性能大幅提升迁移率达16.0 cm^(2)·V^(-1)·s^(-1),开关比达6.2×10^(7),亚阈值摆幅为174 mV/Decade,阈值电压为-2.0 V。该结果证明了印刷Ag电极在氧化物TFT的应用潜力,并有助于建立导电氧化物薄膜和金属导电纳米材料堆叠结构的复合导电薄膜体系,实现优势互补。To meet the requirement of low signal delay of the large-size printed display,it is necessary to develop low-resistance printed electrodes for oxide thin film transistors(TFTs).It is found that the interface contact between inkjet-printed Ag and the active layer is poor,which leads to the poor electrical performance of oxide TFT with the Ag electrode.By inserting inkjet-printed indium tin oxide(ITO)electrode between the Ag electrode and the active layer,the diffusion of Ag nanoparticles in the active layer can be blocked.In addition,the ITO electrode can form good contact characteristics with Ag and the active layer,greatly reducing the contact resistance.The performance of TFT based on Ag/ITO double-layer electrodes is significantly improved compared with that based on single-layer silver electrode:mobility of 16.0 cm^(2)·V^(-1)·s^(-1),switching ratio of 6.2×10^(7),subthreshold swing of 174 mV/Decade,and threshold voltage of-2.0 V.The results demonstrate the application potential of printed Ag electrode in oxide TFT,and contribute to the establishment of a composite conductive film system of stacked structure of metallic conductive nanomaterials and conductive oxide film,realizing complementary advantages.

关 键 词：薄膜晶体管 氧化物半导体 喷墨打印 双层电极 银电极 

分 类 号：TN321.5[电子电信—物理电子学] TH691.9[机械工程—机械制造及自动化]