柔性三角梁约束微纳测头的变刚度特性分析  

Variable stiffness characteristic analysis of micro-nano probe with compliant triangular beam constraint

作　　者：李保坤[1] 程新华 韩迎鸽[2] LI Baokun;CHENG Xinhua;HAN Yingge(School of Mechanical Engineering,Anhui University of Science and Technology,Huainan 232001,China;School of Electrical and Information Engineering,Anhui University of Science and Technology,Huainan 232001,China)

机构地区：[1]安徽理工大学机械工程学院,安徽淮南232001 [2]安徽理工大学电气与信息工程学院,安徽淮南232001

出　　处：《东华大学学报（自然科学版）》2021年第4期84-92,共9页Journal of Donghua University(Natural Science)

基　　金：国家自然科学基金资助项目(51605006);安徽省高校协同创新资助项目(GXXT-2019-048)。

摘　　要：针对目前多数微纳测头约束支撑机构刚度不可调的问题,基于柔性三角梁约束支撑原理,构造一种具有变刚度特性的新型微纳测头结构。利用压电叠堆器驱动柔顺机构以控制约束支撑梁所受轴向力,进一步调节梁的支撑刚度以及约束支撑机构的整体刚度。应用最小势能原理分别建立约束支撑机构的垂直刚度和横向刚度的理论模型,并利用有限元分析法获得支撑刚度随压电叠堆器输出轴向压力的刚度曲线。对比支撑刚度理论值和仿真值大小,结果表明建立的理论刚度模型正确。研究揭示了该新型微纳测头的变刚度机理,为其实际应用过程中的变刚度控制奠定了重要的理论基础。Aiming at the problem that the stiffness of the most types of the micro-nano probes supporting mechanismsis not adjustable,a new type of micro-nano probe structure with variable stiffness based on the compliant triangular beam was constructed.The piezoelectric stacker was used to drive the compliant mechanism to control the axial force of the restrained supporting beam,and further adjust the constraint supporting stiffness of the beam and the overall stiffness of the supporting mechanism.The theoretical model of vertical stiffness and lateral stiffness of the constrained supporting mechanism were established by the principle of minimum potential energy,and the stiffness curve of the supporting stiffness versus the output axial pressure of the piezoelectric stacker was obtained by the finite element analysis.Comparing the theoretical and simulated values of the supporting stiffness,the results show that the established theoretical stiffness model is correct.The research reveals the variable stiffness mechanism of the new micro-probe,which lays an important theoretical foundation for the variable stiffness control in practical applications.

关 键 词：微纳测头 变刚度 最小势能原理 刚度模型 

分 类 号：TH721[机械工程—仪器科学与技术]