(Ti/ZnO)_(N)成分调制纳米多层膜的结构与透光导电性研究  

Structure and Transparent Conductive Properties of(Ti/ZnO)_(N) Compositionally Modulated Nano Multilayer Films

作　　者：牛犇 吴隽[1] 王凯丰 黄成斌 付豪 祝柏林[1] 李涛涛 姚亚刚[2] NIU Ben;WU Jun;WANG Kaifeng;HUANG Chengbin;FU Hao;ZHU Bolin;LI Taotao;YAO Yagang(State Key Laboratory of Refractories and Metallurgy,Faculty of Materials and Metallurgy,Wuhan University of Science and Technology,Wuhan 430081,China;Suzhou Institute of Nano-tech and Nano-bionics,Chinese Academy of Sciences,Suzhou 215123,China)

机构地区：[1]武汉科技大学材料与冶金学院,省部共建耐火材料与冶金国家重点实验室,武汉430081 [2]中国科学院苏州纳米技术与纳米仿生研究所,苏州215123

出　　处：《人工晶体学报》2021年第8期1478-1484,共7页Journal of Synthetic Crystals

基　　金：中国科学院苏州纳米技术与仿生研究所纳米器件与应用重点实验室项目(15QT02)。

摘　　要：采用射频(RF)和单极中频直流脉冲磁控溅射方法,在玻璃基板上制备了(Ti/ZnO)_(N)成分调制纳米多层膜,并研究了调制周期数对其结构及透光导电性能的影响。通过X射线衍射、拉曼光谱、原子力显微镜、紫外可见吸收光谱以及霍尔效应测试结果表明:(Ti/ZnO)_(N)成分调制纳米多层膜以(002)取向的纤锌矿型ZnO结构为主,具有明确的成分调制结构,各Ti层和各ZnO层厚度均匀连续,各界面平整且无明显扩散。在可见光范围的平均透光率大于85%,电阻率最小可达到2.63×10^(-2)Ω·cm。Using radio frequency(RF)and unipolar medium frequency direct-current(DC)pulsed magnetron sputtering methods,(Ti/ZnO)_(N) compositionally modulated nano multilayer films were prepared on the glass substrate,the effects of number of modulation cycles on the the structure and transparent conductive properties of the films were investigated.The results of X-ray diffraction,Raman spectroscopy,atomic force microscopy,ultraviolet-visible transparent spectroscopy and Hall effect show that the prepared(Ti/ZnO)_(N) compositionally modulated nano-multilayer films have hexagonal wurtzite structure of ZnO with preferred(002)orientation,and clear compositionally modulated nano-multilayer structure,in which the Ti and ZnO layers are flat,continuous and with uniform thickness,while the interface is clean and without diffusion.The average optical transmittance in the visible range is higher than 85%while the minimum resistivity is at about 2.63×10^(-2)Ω·cm.

关 键 词：磁控溅射 (Ti/ZnO)_(N) 调制周期数 透光率 电性能 

分 类 号：TB383.2[一般工业技术—材料科学与工程]