MEMS陀螺仪的研究现状与进展  

Research Status and Progress in MEMS Gyroscopes

作　　者：李永[1] 赵正平[2] Li Yong;Zhao Zhengping(The 13^(th)Research Institute,China Electronics Technology Group Corporation,Shijiazhuang 050051,China;Science and Technology on ASIC Laboratory,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]专用集成电路重点实验室,石家庄050051

出　　处：《微纳电子技术》2021年第9期757-768,共12页Micronanoelectronic Technology

摘　　要：MEMS陀螺仪是MEMS传感器中应用最广泛的器件。当今信息智能时代的发展为MEMS陀螺仪带来新的发展机遇,使MEMS陀螺仪进入更高精度和更高可靠性的新的发展阶段。从微结构、电子学控制、工艺平台和集成应用四个方面综述了MEMS陀螺仪的最新进展。对MEMS陀螺仪分别按简并和非简并工作模式;速率陀螺仪的机械化和全角机械化;体Si、表面工艺、3D结构、封装和修调工艺等;高性能集成、高精度校准、数据融合新算法和各类导航应用等详细分类与内容进行介绍。在提取MEMS陀螺仪在微结构等四个方面的技术创新点的基础上,进一步分析了MEMS陀螺仪的发展趋势和未来发展重点。Micro-electromechanical system(MEMS)gyroscopes are the most widely used device in MEMS sensors.The development of information intelligence era brings new development opportunities for MEMS gyroscopes,MEMS gyroscopes have been into the new stage of development with higher precision and higher reliability.The new developments of MEMS gyroscopes are reviewed in four aspects on the microstructure,electronics control,technology platform and integrated application.MEMS gyroscopes are introduced in detail according to the classification and content,respectively,including the merger and non-merger work mode;the rate gyroscope mechanization and whole-angle mechanization;Bulk-Si,surface process,3D structure,encapsulation and repair processes,etc.;high performance integration,high precision calibration,a new data fusion algorithm and various types of navigation applications.On the basis of the extraction of technical innovations of MEMS gyroscopes in four aspects,such as microstructure and so on,the development trend and focus on the future development of MEMS gyroscopes are further analyzed.

关 键 词：MEMS陀螺仪 传感器 角度陀螺仪 速率陀螺仪 惯性测量单元(IMU) 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TH703[机械工程—仪器科学与技术]