基于蓝绿光Micro-LED的可见光通信芯片调制带宽研究  

Study on Modulation Bandwidth of Blue-green Micro-LEDs for Visible Light Communication

作　　者：王轩 陶涛[1] 刘斌[1] 许非凡 梁师豪 苗涛 刘晓燕[2,3] 智婷 谢自力[1] 张荣[1,4] 郑有炓[1] WANG Xuan;TAO Tao;LIU Bin;XU Feifan;LIANG Shihao;MIAO Tao;LIU Xiaoyan;ZHI Ting;XIE Zili;ZHANG Rong;ZHENG Youdou(School of Electronic Science and Engineering,Nanjing University,Nanjing 210046,GHN;College of Electronics and Optical Engineering;College of Microelectronics,Naiijing University of Posts and Telecommunications,Nanjing 210023,CHN;Xiamen University,Xiamen 361005,CHN)

机构地区：[1]南京大学电子科学与工程学院,南京210046 [2]南京邮电大学电子与光学工程学院,南京210023 [3]南京邮电大学微电子学院,南京210023 [4]厦门大学,福建厦门361005

出　　处：《半导体光电》2021年第4期469-473,487,共6页Semiconductor Optoelectronics

基　　金：国家重点研发计划项目(2017YFB0404101);国家自然科学基金项目(61974062,62074077,62004104);江苏省自然科学基金项目(BK20180747);江苏省基础研究计划项目(BK20202005);固态照明与节能电子学协同创新中心项目;中央高校基本科研业务费专项资金资助项目(021014380168)。

摘　　要：基于氮化镓微米LED(Micro-LED)的可见光通信(Visible Light Communication,VLC)技术成为近年来的研究热点。通过深紫外光刻技术制备了小尺寸的氮化镓基蓝/绿光Micro-LED芯片,深入研究了40~10μm不同尺寸Micro-LED器件的性能,以及其作为VLC光源的调制带宽能力。研究发现,随着LED器件尺寸的缩小,其调制带宽显著增加。通过在电极间加入电磁屏障以及对LED器件侧壁进行钝化修复,直径为10μm的绿光Micro-LED亮度可达1×10^(8) cd/m^(2),直径为20μm的蓝光Micro-LED的调制带宽可达372.6MHz。研究结果表明,基于氮化镓的Micro-LED芯片在调制带宽上仍有较大的提升空间,经过进一步的研究,有望推动高速可见光通信的系统应用。Using GaN-based micron-sized LEDs(Micro-LEDs)as the light source for visible light communication(VLC)systems has become a hot research topic in recent years.In this paper,Micro-LED devices with different sizes from 40~10μm have been designed and fabricated by deep UV lithography.The optoelectronic characteristics of GaN-based Micro-LEDs as well as modulation bandwidth performance were systematically investigated.It is found that the modulation bandwidth can be significantly increased by decreasing the device size.By optimizing sidewall passivation and electromagnetic shielding,high brightness as much as 1×10^(8) cd/m^(2) has been acquired by the green Micro-LED chip with 10μm in diameter.Furthermore,the modulation bandwidth of a single blue Micro-LED of 20μm can reach 372.6 MHz.The results show that higher modulation bandwidth can be expected for the GaN-based Micro-LED chip,and it is expected to promote the application of high-speed visible light communication system in the near future.

关 键 词：可见光通信(VLC) Micro-LED 调制带宽 氮化镓 

分 类 号：TN929.[电子电信—通信与信息系统]