MEMS陀螺仪驱动与检测电路设计  

Design of driving and detecting circuit for MEMS gyroscope

作　　者：王涛 王松 崔智军 Wang Tao;Wang Song;Cui Zhijun(College of Electronic and Information Engineering,Ankang University,Ankang 725000,China)

机构地区：[1]安康学院电子与信息工程学院,陕西安康725000

出　　处：《无线互联科技》2021年第16期64-65,76,共3页Wireless Internet Technology

基　　金：安康学院2019年国家级大学生创新创业训练计划项目,项目编号:201911397010;安康学院2020年省级大学生创新创业训练计划项目,项目编号:S202011397053。

摘　　要：传统陀螺仪的测控电路是由分立的模拟电路组成,陀螺仪输出信号的性能易受温度等环境因素影响。针对以上问题,文章基于Altera公司的MAX系列FPGA芯片,设计实现了MEMS陀螺仪的驱动与检测电路系统。系统主要包含PLL模块、ADC控制模块、数据解算模块、DDS模块、自动增益控制模块和SPI控制模块。通过FPGA开发板进行下板测试,由PC端的信号采集与测试平台得出:扫频模式下MEMS陀螺仪三轴的谐振频率分别为5485、5513、5462 Hz;闭环模式下MEMS陀螺仪三轴的角速度分别为0.000193,0.003409和0.005329;同时系统运行稳定,实时性比较好,为后续的标定和测试奠定了一定的基础。Since the measurement and control circuit of traditional gyroscope is composed of discrete analog circuits,the performance of the gyroscope’s output signal is susceptible to temperature and other factors.Based on Altera’s MAX series FPGA chips,this paper designs and implements the MEMS gyroscope driving and detection circuit system.The system mainly includes PLL module,ADC control module,data calculation module,DDS module,automatic gain control module and SPI control module.The FPGA development board is used to test the system through signal acquisition and testing platform based on PC:the resonant frequencies of the three axes found in the sweep mode are 5485,5513,and 5462 Hz;the angular velocity of the three axes of the MEMS gyroscope in closed-loop mode is 0.000193,0.003409,and 0.005329;the system is stable in operation and strong in realtime,which lays a certain foundation for subsequent calibration and testing.

关 键 词：微机械陀螺仪 MEMS技术 FPGA 

分 类 号：TH824.3[机械工程—仪器科学与技术]