改进型单晶炉提拉系统偏心平衡研究  

Eccentric Balance of Improved Single Crystal Furnace Lifting System

作　　者：王维 黄鸣 常晓鱼 张昊[2] 吴奇 龙连春[2] WANG Wei;HUANG Ming;CHANG Xiaoyu;ZHANG Hao;WU Qi;LONG Lianchun(Beijing NAURA Vacuum Technology Co. Ltd., Beijing 100015, China;Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China)

机构地区：[1]北京北方华创真空技术有限公司,北京100015 [2]北京工业大学材料与制造学部,北京100124

出　　处：《人工晶体学报》2021年第9期1774-1779,共6页Journal of Synthetic Crystals

摘　　要：随着光伏行业的快速发展,对硅单晶的品质和长晶装备的稳定性的要求也不断提高。直拉法是生产硅单晶的主要方法,通过提高单晶炉副室的高度以扩大单晶硅的生产规模。由于副室高度的大幅增加,且单晶炉提拉头质心相对于旋转轴心有一定距离,对单晶炉整体稳定性有较大影响,从而降低了单晶硅的生产质量。针对此问题,对单晶炉建立可靠的力学分析模型,采用数值仿真方法,对单晶炉整体进行动力学响应分析,计算得到副室高度增加后的单晶炉工作时中钨丝绳下端晶棒的运动规律以及最大摆动幅度,为改进设计提供依据。数值仿真分析表明提高单晶炉副室高度后,提拉头较大的质心偏心是单晶炉提拉系统发生摆动的主要原因。在此基础上提出在提拉头上添加质心调节装置,通过控制系统调节可保证提拉头质心位置在旋转轴线上以降低提拉系统的摆动。With the rapid development of photovoltaic industry,the quality requirement of silicon single crystal is increasing.Czochralski is the main method to produce single crystal silicon.The production scale of single crystal silicon can be enlarged by increasing the height of the sub-chamber in the single crystal furnace.Due to the large increase in the height of the sub-chamber and the distance between the centroid of the single crystal furnace lifting head and the rotating axis of the single crystal furnace,the overall stability of the single crystal furnace is greatly affected and the production quality of the single crystal silicon is reduced.In order to solve this problem,a reliable mechanical analysis model of single crystal furnace was established,and the dynamic response of the whole single crystal furnace was analyzed by numerical simulation method.The law of motion and the maximum swing amplitude of the bottom end of tungsten wire rope were calculated when the height of the sub-chamber was increased,which provides a basis for improving the design.The numerical simulation analysis shows that the large eccentricity of the lifting head is the main reason for the shaking of the single crystal furnace lifting system.For this reason,it is proposed to add a centroid adjustment device to the lifting head,and the control system is adjusted to ensure that the mass center of the lifting head is on the rotation axis to reduce the swing of the lifting system.

关 键 词：改进型单晶炉 硅单晶 提拉头质心 偏心 数值模拟 动力学响应 

分 类 号：TN305[电子电信—物理电子学]