超精密大行程滚珠丝杠进给系统设计与实验研究  

Design and Experimental Study of Ultra-precision Large-stroke Ball Screw Feeding System

作　　者：薛宝珠 李梦阳[1] 郭英杰 XUE Baozhu;LI Mengyang;GUO Yingjie(Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang Sichuan 621900,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《机床与液压》2021年第20期23-27,共5页Machine Tool & Hydraulics

基　　金：中国工程物理研究院创新发展基金资助项目(K1249-2020-TCF);四川省科技成果转移转化示范项目(20ZHSF0138)。

摘　　要：针对单级驱动系统难以同时实现大行程与超精密定位的问题,设计一种基于滚珠丝杠与液体静压导轨的超精密大行程进给系统实验台。无框式直驱电机通过胀紧套直接与滚珠丝杠联接,实现类似于直线电机的“零传动”,采用纳米级分辨率光栅尺实时检测运动部件的位移。实验结果表明:通过G代码补偿、摩擦补偿、提高PWM频率、降低干扰等方式,可以提高系统的定位性能,进给系统在180 mm的有效行程内可以实现103 nm定位精度和8 nm运动分辨率。In order to solve the problem that the single-level drive system is difficult to realize the large-stroke and ultra-precision positioning at the same time,an ultra-precision large-stroke feeding experimental platform based on ball screw and hydrostatic guide rail was designed.The frameless direct drive motor was directly connected with the ball screw through the expansion sleeve,and“zero transmission”similar to the linear motor was achieved.The displacements of the moving parts were detected in real time by using the nanometer resolution grating ruler.Experimental results show that the positioning performance of the system can be improved by means of G code compensation,friction compensation,increasing PWM frequency and reducing interference.The feeding system can achieve the positioning accuracy of 103 nm and the motion resolution of 8 nm in an effective stroke of 180 mm.

关 键 词：超精密定位 大行程 滚珠丝杠进给系统 定位精度 分辨率 

分 类 号：TH39[机械工程—机械制造及自动化]