基于天然高分子的可再生光刻材料的研究进展  

Research progress of renewable lithography materials based on natural polymers

作　　者：陕绍云[1] 王守宏 支云飞 SHAN Shaoyun;WANG Shouhong;ZHI Yunfei(Faculty of Chemical Engineering,Kunming University of Science and Technology,Kunming 650504,Yunnan,China)

机构地区：[1]昆明理工大学化学工程学院,云南昆明650504

出　　处：《精细化工》2021年第10期1945-1955,共11页Fine Chemicals

基　　金：昆明市科学技术局科技计划基金(2019-1-G-25318000003480);国家自然科学基金(21766016);云南省“万人计划”基金(YNWR-QNBJ-2018-198);云南省基础研究计划青年项目(202001AU070023);倪永浩院士工作站(2019IC002);昆明市科学技术局科技创新要素聚集计划重点项目(2019-1-A-24657)。

摘　　要：与传统基于石油原料的光刻材料相比,基于天然高分子的可再生光刻材料不仅保留了高分辨率的光刻性能,还具有绿色可再生和无毒显影等优点。重点综述了天然高分子光刻材料中的蛋白类光刻材料和多糖类光刻材料,总结了各种天然高分子光刻材料的优缺点。通过对不同材料光刻机理的深入研究,总结出蛋白质光刻材料的光刻机理主要依靠辐射改变蛋白结构,使其溶解度在显影液中发生改变实现光刻;而天然多糖类光刻材料则主要依赖引入光响应基团实现光刻。最后对基于天然高分子的可再生光刻材料的现存问题进行了分析并对发展前景作出了展望。Compared with the traditional lithography materials based on petroleum raw materials, the renewable lithography materials based on natural polymers retain high-resolution lithography performance and have the advantages of green, renewable and non-toxic development. Protein lithography materials and polysaccharide lithography materials in natural polymer lithography materials are mainly reviewed, and the advantages and disadvantages of various natural polymer lithographic materials are summarized. Through the in-depth study on the lithography mechanism of different materials, it is concluded that the lithography mechanism of protein lithography materials mainly relies on radiation to change the structure of the protein,so that the solubility of protein is changed in the developer to achieve lithography, while the natural polysaccharide lithography materials mainly rely on the introduction of photo-responsive groups to achieve lithography. Finally, the existing problems of renewable lithography materials based on natural polymers are analyzed and their development prospect is prospected.

关 键 词：天然高分子 可再生性 光刻材料 光刻机理 动物蛋白 天然多糖 

分 类 号：TB34[一般工业技术—材料科学与工程]