圆光栅测角误差补偿方法  

Compensation Method of Circular Grating Angle Measurement Error

作　　者：李忠明 李俊霖 韩冰 唐延甫 杨永强 马悦 LI Zhong-ming;LI Jun-lin;HAN Bing;TANG Yan-fu;YANF Yong-qiang;MA Yue(Changchun Institute of Optics,Fine Mechanics and Physics,Changchun 130033,China;University of Chinese Academy of Science,Beijing 100049,China)

机构地区：[1]长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《仪表技术与传感器》2021年第10期56-59,89,共5页Instrument Technique and Sensor

摘　　要：提出了一种使用增量式圆光栅的高精度转台,并针对圆光栅安装偏心导致的测角误差,利用三阶正弦拟合的方法进行误差修正。首先介绍了一种蜗轮蜗杆转台,然后介绍了圆光栅测角误差的主要来源,分析了圆光栅安装不当导致测角误差的产生机理及误差分布规律。利用多齿分度台和自准直仪对测角精度进行标定,分析标定后的转台误差分布规律,利用三阶正弦拟合的方法对转台进行误差修正。最后,分别利用多齿分度台和十七面体对误差修正效果进行实验验证。实验结果表明:利用此方法进行误差补偿,最大误差由114.4″降低到1.8″。A high precision turntable using incremental circular grating was presented,and the error correction was made by using the third order sinusoidal fitting method,aiming at the angle measurement error caused by the eccentricity of the circular grating.This paper first introduced a worm wheel and worm turntable,then introduced the main source of angle measurement error of circular grating,and analyzed the mechanism and distribution of angle measurement error caused by improper installation of cir⁃cular grating.The angle measuring accuracy was calibrated by using the multi⁃tooth dividing table and the self⁃collimator,the error distribution of the calibrated turntable was analyzed,and the error was corrected by using the third order sinusoidal fitting method.Finally,the error correction effect was verified by experiments using the multi⁃tooth dividing table and the heptahedron respective⁃ly.The experimental results show that the maximum error is reduced from 114.4″to 1.8″by using this method.

关 键 词：圆光栅 测角误差 偏心 误差补偿 标定 数据拟合 

分 类 号：TB922[一般工业技术—计量学]