碳化硅用多线切割机张力控制系统技术研究  

Research on Tension Control System Technology of Multi-wire Saw for SiC

作　　者：董同社 毛善高 段成龙[1] DONG Tongshe;MAO Shangao;DUAN Chenglong(The 45^(th) Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2021年第5期22-26,共5页Equipment for Electronic Products Manufacturing

摘　　要：介绍了一种碳化硅用多线切割机张力控制系统的组成结构、工作原理,通过对多线切割机张力控制系统进行深入地理论研究,建立了控制系统的运动学和动力学模型。在此基础上,提出了一种PID速度同步跟随控制方案,经多次实验数据和结果表明,该方案可靠、稳定、控制精度高、调整方便。This paper introduces the structure and working principle of a tension control system of multi-wire cutting machine for silicon carbide(SiC).Through the in-depth theoretical research on the tension control system of multi-wire cutting machine.The kinematics and dynamics models of the control system are established.On this basis,a PID speed synchronous following control scheme is proposed.The experimental data and results show that the scheme is reliable,stable,with high control precision and convenient adjustment.

关 键 词：碳化硅 多线切割机 张力控制系统 

分 类 号：TN305[电子电信—物理电子学]