小型化硅基毫米波MEMS三维异构集成开关滤波器件  被引量:2

Heterogeneously Integrated Compact Switchable Filters in 3D-MEMS Silicon Process for Millimeter Wave Application

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作  者:侯芳 孙超[2] 栾华凯 黄旼 朱健[2,3] 胡三明[1] HOU Fang;SUN Chao;LUAN Huakai;HUANG Min;ZHU Jian;HU Sanming(State Key Laboralory of Millimeter Wave,Southeast University,Nanjing,210096,CHN;Nanjing Electronic Device Instiute,Narnjing,210016,CHN;Science and Technology on Monolithic Integrated Circuits and Modules Laboraory,Nanjing,210016,CHN)

机构地区:[1]东南大学毫米波国家重点实验室,南京210096 [2]南京电子器件研究所,南京210016 [3]微波毫米波单片集成和模块电路重点实验室,南京210016

出  处:《固体电子学研究与进展》2021年第5期330-336,共7页Research & Progress of SSE

摘  要:针对传统开关滤波器组件体积庞大、重量重、调试复杂、集成度低的问题,设计并制作了一种小型化六通道毫米波硅基MEMS三维异构集成开关滤波器件。该器件以四层堆叠的高阻硅材料为衬底,工作频段覆盖18~40 GHz,内部集成了6款小型化空间堆叠的MEMS滤波器和2个单片开关,采用3D-TSV(硅通孔)异构集成工艺,实现了开关与滤波器组的晶圆级集成。为了优化毫米波频段集成滤波器性能,提出了MEMS混合交叉耦合多层堆叠SIW(基片集成波导)滤波器拓扑结构,且其工艺与整个开关滤波器件兼容,极大提升了滤波器的带外抑制。经测试,该开关滤波器件带内插损<8.2 dB(包括2个开关共约4 d B的损耗),反射损耗>10 dB,带边1 GHz处带外抑制>40 dBc。该器件体积仅19.0 mm×16.5 mm×1.1 mm,比传统开关滤波器体积减小了99.7%。In order to address the problems of bulky size,heavy weight,low integration and complicated debugging of conventional switchable filter banks,a compact switchable filter bank with six channels and heterogeneously integrated for millimeter-wave applications was proposed and fabricated in this paper.The filter bank was based on four-layered silicon substrates,its operating frequency band covered 18~40 GHz,and two switches and six miniaturized vertical stacked MEMS filters were integrated inside.These filters were stacked and heterogeneously integrated with switches by wafer-to-wafer bonding in 3D through-silicon via(TSV)process.To optimize the performance of the inner filters,a stacked microelectromechanical systems(MEMS)filter with substrate integrated waveguide(SIW)topology was proposed with hybrid cross coupling to enhance the stopband rejection.The fabrication of filters was compatible with the whole process of the switchable filter bank.Measurement results show that the fabricated prototype achieves insertion losses within 8.2 dB,including two switch losses of 4 dB in the passbands,and a high rejection of 40 dBc at±1 GHz from sideband.Moreover,the size of the switchable filter bank is only 19.0 mm×16.5 mm×1.1 mm,which is significantly reduced by 99.7%compared with conventional product.

关 键 词:三维异构集成 微电子机械系统 硅通孔 滤波器 基片集成波导 

分 类 号:TN73[电子电信—电路与系统]

 

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