IC工艺技术研究生教学创新实例设计研究  

Research on Design of IC Process Technology Graduate Teaching Innovative Examples

作　　者：王秀宇 徐江涛 高志远 聂凯明 高静 WANG Xiuyu;XU Jiangtao;GAO Zhiyuan;NIE Kaiming;GAO Jing(School of Microelectronics,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学微电子学院,天津300072

出　　处：《现代信息科技》2021年第14期182-184,189,共4页Modern Information Technology

基　　金：天津大学研究生创新人才培养项目(YCX202048,YCX202161)。

摘　　要：创新实践教学对集成电路(IC)专业研究生人才培养极其重要。文章根据CMOS图像传感器像素与NMOS器件在结构上的相似性,通过科教融合设计了创新实例用于IC工艺技术课的研究生教学,取得了较好的效果。该教学改革一方面激发了学生的学习兴趣、调动了他们自主学习该课的积极性,另一方面在创新实践教学中加深了学生对该课基础知识的理解,培养了他们的创新实践能力。Innovative practice teaching is very important for the cultivation of graduate students majoring in integrated circuit (IC).According to the structural similarity between CMOS image sensor pixels and NMOS devices,this paper designs an innovative example through science and education integration,which is used in the graduate teaching of IC process technology course,and has achieved good results.On the one hand,the teaching reform has stimulated students’ interest in learning and mobilized their enthusiasm to study the course independently.On the other hand,it has deepened students’ understanding of the basic knowledge of the course and cultivated their innovative practice ability in innovative practice teaching.

关 键 词：科教融合 IC工艺技术 研究生教学 创新实践 

分 类 号：TN4[电子电信—微电子学与固体电子学] G643.2[文化科学—高等教育学]