离子注入法在316L不锈钢基体上制备Al_(2)O_(3)阻氚涂层  

Preparation of Al_(2)O_(3) Coatings as Tritium-Resistance Coating by Ion Implantation on 316L Stainless Steel

作　　者：冯军[1] 李必文[1] 陈文波[1] 陈美艳[2] 但敏[2] Feng Jun;Li Biwen;Chen Wenbo;Chen Meiyan;Dan Min(University of South China,Hengyang 421001,China;Southwestern Institute of Physics,Chengdu 610041,China)

机构地区：[1]南华大学,湖南衡阳421001 [2]核工业西南物理研究院,四川成都610041

出　　处：《稀有金属材料与工程》2021年第11期3896-3900,共5页Rare Metal Materials and Engineering

基　　金：National Key Research and Development Program of China(2018YFE0313100);Scientific Research Project of Hunan Provincial Department of Education(18A249)。

摘　　要：采用离子注入技术在316L不锈钢基体上制备了氧化铝阻氚涂层。对离子注入法的不同工艺参数对α-Al_(2)O_(3)涂层摩擦磨损、耐腐蚀、抗热震、阻氚性能的影响进行了研究。结果表明:温度、加速电压及离子注入剂量对α-Al_(2)O_(3)的含量均有影响。温度升高时,α-Al_(2)O_(3)的含量增加。增大加速电压及离子注入剂量时,α-Al_(2)O_(3)含量均出现先升高后降低的规律。离子注入剂量对涂层的摩擦磨损、耐腐蚀性能影响比较大:离子注入剂量越大,涂层的耐磨、耐腐蚀性能越好。涂层经过200次热震测试后未发生变化,抗热震性能较好。Al_(2)O_(3)膜层具有优异的阻氚性能,在600℃下能使316L不锈钢的氚渗透率降低3个数量级。The alumina coatings as a tritium-resistance coating were deposited on 316L stainless steel by ion implantation.The effects of different parameters of ion implantation process on the wear resistance,corrosion resistance,thermal shock resistance,and tritium permeation resistance ofα-Al_(2)O_(3) were investigated.Results show that the content ofα-Al_(2)O_(3) is affected by temperature,acceleration voltage,and ion implantation dose.With increasing the temperature,the content ofα-Al_(2)O_(3) is increased.With increasing the acceleration voltage or ion implantation dose,the content ofα-Al_(2)O_(3) is firstly increased and then decreased.The wear resistance and corrosion resistance are mainly affected by the ion implantation dose:with increasing the ion implantation dose,the wear and corrosion resistance becomes better.The Al_(2)O_(3) coatings hardly changes after 200 times of thermal shock tests,indicating a good thermal shock resistance.The tritium permeability of the coated specimen is reduced by 3 orders of magnitude,compared with that of the 316L stainless steel bulk.

关 键 词：离子注入技术 氧化铝涂层 阻氚涂层 

分 类 号：TG174.4[金属学及工艺—金属表面处理]