直线超声电机驱动的并联微夹持器的振动控制  

Vibration Control of a Parallel Microgripper Driven by Linear Ultrasonic Motors

作　　者：耿冉冉 姚志远[2] 徐豪 张阳阳[2] GENG Ranran;YAO Zhiyuan;XU Hao;ZHANG Yangyang(Industrial Center/School of Innovation and Entrepreneurship,Nanjing Institute of Technology Nanjing,211167,China;State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics Nanjing,210016,China)

机构地区：[1]南京工程学院工业中心、创新创业学院,南京211167 [2]南京航空航天大学机械结构力学及控制国家重点实验室,南京210016

出　　处：《振动．测试与诊断》2022年第1期11-15,190,191,共7页Journal of Vibration,Measurement & Diagnosis

基　　金：国家自然科学基金资助项目(52075261);江苏省自然科学基金资助项目(BK20191018);江苏省高等学校自然科学研究重大资助项目(20KJA510007)。

摘　　要：针对直线超声电机驱动的并联微夹持器手指的振动问题,提出了一种基于状态反馈的主动控制方法来抑制微夹持器手指的振动,提高了微夹持器的稳定性。首先,利用有限单元法建立了微夹持器系统中圆盘与活动手指的动力学模型,并推导其状态方程;其次,分析该振动系统的能控性和稳定性,采用极点配置法得到状态反馈矩阵,设计了振动反馈控制律,通过Simulink对该反馈系统进行仿真分析,验证了主动控制对手指振动的抑制效果;最后,利用该控制系统分别对微米级的钢珠以及茶花花粉细胞进行夹取实验。结果表明,该主动控制策略下微夹持器的夹持性能及稳定性能够满足微纳定位精度的要求。This paper proposes an active control mothed based on the state feedback to suppress the vibration of the parallel microgripper finger driven by linear ultrasonic motors,to improve the stability of the microgripper.First,the dynamic model of the disk and the moving finger in microgripper system is established by finite ele⁃ment method,and the state equation is derived.Then,the controllability and stability of the vibration system are analyzed.The state feedback matrix is obtained by pole assignment method,and the vibration feedback con⁃trol law is designed.The feedback system is simulated and analyzed by Simulink to verify the vibration suppres⁃sion effect of the active control on the finger.Finally,the experiments of clamping steel ball and camellia pollen cell in micron scale are carried out by using the designed control system.The results indicate that the clamping performance and stability of the microgripper under the active control strategy can meet the requirements of mi⁃cro-nano positioning accuracy.

关 键 词：微夹持器 直线超声电机 振动控制 状态反馈 

分 类 号：TP24[自动化与计算机技术—检测技术与自动化装置] TH113[自动化与计算机技术—控制科学与工程]