微电子工艺教学实验室建设的探索与实践  

Exploration and practice of microelectronics process teaching laboratory construction

作　　者：黄展云 陈晖 谢德英 陈弟虎 HUANG Zhanyun;CHEN Hui;XIE Deying;CHEN Dihu(School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510006,China)

机构地区：[1]中山大学电子与信息工程学院,广东广州510006

出　　处：《实验室科学》2021年第6期126-129,共4页Laboratory Science

基　　金：2017年广东省本科高校质量工程实验教学示范中心项目(项目编号:2017209);2018年度中山大学本科教学改革研究项目(项目编号:76120-18832603)。

摘　　要：为适应微电子产业的高速发展,高校的微电子工艺教学实验室的建设和实验教学对专业人才的培养发挥着极其重要的作用。介绍了微电子工艺教学实验室建设的目标和设想,详细阐述了实验室的建设规划、建设内容和内涵建设。微电子工艺教学实验室的建设完善了中山大学电子与信息工程学院微电子专业的实验教学体系,为开设微加工实验课程提供了教学平台,将理论与实践紧密结合,有利于提高学生的实践能力和创新能力。In order to adapt to the rapid development of microelectronics industry, the construction of microelectronics process teaching laboratory and experimental teaching play an extremely important role in the training of professionals. This paper introduced the objectives and ideas of the construction of microelectronics process teaching laboratory. And then, we described the construction plan, content and connotation construction of the laboratory. The construction of the laboratory has perfected the experimental teaching system of microelectronics specialty in our college. It provided a teaching platform for opening the microfabrication experiment course. Combining theory with practice, it helps to improve students’ practical and innovative abilities.

关 键 词：微电子工艺 教学实验室 实验室建设 内涵建设 

分 类 号：G482[文化科学—教育学]