基于重复控制的半导体巨量转移设备高速高精定位方法研究  

Research on High Speed and High Precision Positioning Method of Semiconductor Giant Transfer Equipment Based on Repeated Control

作　　者：张勇 汪承研 ZHANG Yong;WANG Cheng-Yan(Guangdong Mechanical&Electrical Polytechnic,Guangzhou Guangdong510550,China)

机构地区：[1]广东机电职业技术学院,广东广州510550

出　　处：《机电产品开发与创新》2022年第1期89-91,共3页Development & Innovation of Machinery & Electrical Products

基　　金：2019年广东省普通高校特色创新项目(No. 2019GKTSCX020);2019广东省自然科学基金面上项目 (No. 2019A1515011349)。

摘　　要：半导体巨量转移设备执行点对点的重复快速点位运动,要求运动具有高速高加速和快速高精到位性能。直线电机由于其推重比高、精度高和结构简单等优点而广泛应用于mini LED等半导体巨量转移装备,但其正因为采用直线电机直接驱动,加载在执行机构的干扰直接施加在驱动电机上,对运动控制提出了更高要求。本文将基于驱控一体控制器对负责高速高精位置定位的上下两层XY直线电机提出一种P+改进重复控制的控制方法应用于该电机级联控制的位置环,其中重复控制器应用于负载惯量和有规律干扰的补偿,P控制器应用于随机干扰的快速抑制,本控制方法将有效实现巨量倒装转移系统控制的高速高精运动要求。Semiconductor giant transfer equipment mainly performs point-to-point repeated movement,which requires high speed,high acceleration and high precision positioning performance.The linear motor is widely used in semiconductor giant transfer equipment such as mini LED due to its high push-weight ratio,high precision and simple structure,however,the interference of loading in the actuator is directly applied to the motor because of direct drive,which needs higher requirements for motion control.This paper proposes a PID and improved repetitive control method for the position loop of upper and lower XY linear motors,the repetitive controller is applied to the load inertia and regular interference compensation,and the PID controller is applied to the rapid suppression of the random interference.The control method effectively meets the high speed high precision motion requirements of mini LED giant inversion transfer system.

关 键 词：PID 半导体 重复控制 直线电机 级联控制 

分 类 号：TM359.4[电气工程—电机]