涡轮分子泵叶列抽气性能的计算方法改进  

Improvement of the Calculation Method of the Pumping Performance of the Turbomolecular Pump Blade Row

作　　者：匡永麟 王晓冬[1] 黄海龙[1] 张鹏飞 KUANG Yonglin;WANG Xiaodong;HUANG Hailong;ZHANG Pengfei(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]东北大学机械工程与自动化学院,沈阳110819

出　　处：《真空科学与技术学报》2022年第1期26-30,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家重大科学仪器设备开发专项项目(2013YQ130429)。

摘　　要：涡轮分子泵广泛应用于清洁高真空的获得。本文采用实验粒子蒙特卡洛算法,使用COMSOL对二维模型进行计算,更新了单级叶列抽气性能参数数据库,并在此基础上提出了计算涡轮叶列传输几率的新方法——面积加权法,同时根据改进算法编写计算程序。面积加权法更加接近于涡轮叶列的工况,使用此方法提高了计算准确度,为涡轮分子泵组合叶列的计算提供了可靠的支撑,为涡轮分子泵设计与性能评估提供了方法与依据。The turbomolecular pump is widely used to obtain clean-high vacuum.In this paper,the experimental particle Monte Carlo algorithm is used to calculate the two-dimensional model using COMSOL,and the single-stage blade row pumping performance parameter database is updated,and on this basis,a new method for calculating the transmission probability of the turbine blade row area weighting is proposed.At the same time,the calculation program is written according to the improved algorithm.The area weighting method is closer to the working conditions of the turbine blade row.Using this method improves the calculation accuracy,provides reliable support for the calculation of the turbomolecular pump combined blade row,and provides a method and basis for the design and performance evaluation of the turbomolecular pump.

关 键 词：涡轮分子泵 抽气性能 传输几率 数值计算 面积加权法 

分 类 号：TB752.27[一般工业技术—真空技术]