铟柱高度快速测量方法研究  

Research on Rapid Measurement Method of Indium Columns Height

作　　者：张鹏[1] 冯晓宇 张轶 ZHANG Peng;FENG Xiao-yu;ZHANG Yi(North China Research Institute of Electro-Optics, Beijing 100015, China)

机构地区：[1]华北光电技术研究所,北京100015

出　　处：《红外》2022年第2期15-21,共7页Infrared

摘　　要：在红外探测器铟柱蒸发的工艺试验中,有需要测量大量铟柱高度的情况,因此对铟柱高度测量方法进行了研究。手动逐点测量铟柱高度方式的结果较为准确,但是测量速度比较慢,消耗时间比较多。快速自动测量的方法使用了显微镜的扫描功能,并利用图像识别技术来自动识别铟柱,能够一次获取所有铟柱的高度,所以测量速度很快。详细介绍了这两种方法的操作步骤和重要选项的设置。经过测算,用快速测量方法测量1000个铟柱的高度只需要30分钟,测量时间能够减少76%,极大地提高了测量效率。最后分析了两种不同测量方法的优点和缺点。In the process test of indium column evaporation of infrared detector,sometimes it is necessary to measure a large amount of indium column heights,so the measurement method of indium column height is studied in this paper.The manual method which measures point by point can get accurate results.But the measurement speed is slow and it takes a lot of time.The rapid automatic measurement method uses the scanning function of the microscope and the image recognition technology to automatically identify the indium columns.It can obtain the heights of all indium columns at one time,so the measurement speed is very fast.The steps,procedures and key option settings of the two methods are introduced in detail in this paper.It is estimated that the second rapid measurement method only takes 30 minutes to measure the heights of 1000 indium columns,reducing the measurement time by 76%and greatly improving the measurement efficiency.Finally,the advantages and disadvantages of the two different measurement methods are analyzed.

关 键 词：红外探测器 铟柱 互连 高度测量 

分 类 号：TN215[电子电信—物理电子学]