基于多模微环谐振腔光芯片的温度测量装置设计  

Design of temperature measurement device based on multi-mode micro-ring resonator optical chip

作　　者：卢瑾[1] 张昱路 任宏亮[2] 覃亚丽[2] LU Jin;Zhang Yulu;REN Hongliang;Qin Yali(College of Computer Science&Technology,Zhejiang University of Technology,Hangzhou 310023,China;College of Information Engineering,Zhejiang University of Technology,Hangzhou 310023,China)

机构地区：[1]浙江工业大学计算机科学与技术学院,浙江杭州310023 [2]浙江工业大学信息工程学院,浙江杭州310023

出　　处：《实验技术与管理》2022年第2期110-115,共6页Experimental Technology and Management

基　　金：浙江省自然科学基金(LY20F050009);上海交通大学区域光纤通信网与新型光通信系统国家重点实验室开放基金(2020GZKF013)。

摘　　要：为提高微纳光学传感器的测温精度,基于多模微环谐振腔光芯片,搭建了高精度温度测量装置。装置通过采集微环谐振腔多模温度传感数据,利用人工神经网络算法有效融合多模传感信息,提高传感灵敏度。实验结果表明,多模传感方法在24.9~32.0℃的温度范围内,测量精度为±0.074℃,与单模微环谐振腔传感方法相比降低了温度探测极限。In order to improve the temperature measurement accuracy of micro-nano optical sensors, a high precision temperature measurement device is built based on multimode micro-ring resonator optical chip. The device collects the multimode temperature sensing data of the micro-ring resonator, and uses the artificial neural network algorithm to effectively integrate the multimode sensing information to improve the sensing sensitivity.The experimental results show that the measurement accuracy of the multi-mode sensing method is ±0.074 ℃ in the temperature range of 24.9~32.0 ℃, which reduces the temperature detection limit compared with the single-mode micro-ring resonator sensing method.

关 键 词：光芯片 微环谐振腔 多模传感信息融合 广义回归神经网络 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术] G642[自动化与计算机技术—计算机科学与技术]