二维WSe_(2)化合物晶体图形化构筑综合性实验设计  

Comprehensive experimental design on patterning two-dimensional WSe_(2) compound crystal

作　　者：王震东[1] 王剑宇 王立[1] WANG Zhendong;WANG Jianyu;WANG Li(Department of Physics,Nanchang University,Nanchang 330031,China)

机构地区：[1]南昌大学物理系,江西南昌330031

出　　处：《实验技术与管理》2022年第3期47-50,61,共5页Experimental Technology and Management

基　　金：国家自然科学基金项目(61764011);江西省自然科学基金(20212BAB201030);江西省学位与研究生教育教学改革研究项目(JXYJG-2020-036)。

摘　　要：二维材料图形化是实现器件规模化制备的有效途径,也是目前材料、物理和化学等学科的研究热点。基于此,该文设计了二维WSe_(2)化合物晶体图形化构筑的多学科交叉综合性实验,利用金属材料的诱导作用,采用化学气相沉积法,在SiO;/Si衬底上构筑了有序的WSe_(2)晶体阵列。扫描电子显微镜观测发现WSe_(2)晶体围绕着金属点生长,并形成了有序二维晶体图形;透射电子显微镜和拉曼光谱进一步确证了WSe_(2)晶体的高质量合成。该综合性设计性实验能有效打破学科壁垒,拓展学生的实验技能范围,培养学生的创新思维和科研能力。The patterning of two-dimensional materials is an effective way to realize the large-scale fabrication of devices,and it is also a research hotspot of materials,physics,chemistry and other disciplines.Based on this,this paper presents a multidisciplinary comprehensive experiment on the patterning of two-dimensional WSe_(2)compound crystal.Using the induction of metal materials,the highly ordered arrays of WSe_(2)crystal is fabricated on SiO;/Si substrate by chemical vapor deposition method.Scanning electron microscope(SEM) observation shows that WSe_(2)crystal grew around the metal materials and formed the ordered pattern of two-dimensional crystals.The high quality synthesis of WSe_(2)crystal is confirmed by transmission electron microscopy and Raman spectroscopy.The experiment can effectively break though the discipline barriers by setting up comprehensive design experiments in this research fields,expand the scope of students’ experimental skills,and then cultivate their innovative thinking and scientific research ability.

关 键 词：过渡金属二硫化物 图形化生长 WSe_(2)晶体 化学气相沉积 

分 类 号：O472[理学—半导体物理]