光刻投影物镜中动镜X-Y向柔性调节机构设计  

Design of X-Y Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective

作　　者：杨超 朱咸昌[1] 金川 胡松[1] Yang Chao;Zhu Xianchang;Jin Chuan;Hu Song(State Key Laboratory of Optical Technologies for MicroFabrication,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《激光与光电子学进展》2022年第4期241-249,共9页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61875201,61975211,62005287);四川省杰出青年科技人才(2020JDJQ0005);四川省中央引导地方科技发展项目(2020ZYD020)。

摘　　要：针对光刻投影物镜中动镜X-Y向调节机构精度高、行程小、结构紧凑的需求,提出了一种X-Y向一体式调节机构。所提机构基于四连杆调节原理,利用内外圈独立分布的X-Y向柔性铰链,无需解耦即可实现X/Y向高精度调节。首先根据投影物镜中动镜的调节精度和行程,完成所提机构的结构设计;然后运用有限元分析法仿真分析所提X-Y向柔性调节机构的性能。分析结果表明:所提机构调节行程大于±20μm,X向、Y向的刚度值分别为0.542μm/N、0.671μm/N;单X、Y向开环驱动时,垂直方向耦合误差与主方向移动量之比分别为6.86%、4%;模态大于100 Hz。最后,对所提调节机构进行了性能测试实验,X向重复定位精度为36.3 nm,Y向为41.7 nm;调节过程中,角度偏移小于0.5″。实验结果表明,所提柔性调节机构能够满足光刻投影物镜像质补偿对X-Y向高精度调节要求。Aiming at the requirements of high precision,small stroke,and compact structure of X-Y direction adjustment mechanism of moving mirror in lithography projection objective,an X-Y direction integrated adjustment mechanism is proposed.Based on the fourbar adjustment principle,the proposed mechanism uses X-Y flexure hinges with independent inner and outer rings to realize highprecision adjustment in X/Y direction without decoupling.First,the structure design of the proposed mechanism is completed according to the adjustment accuracy and stroke of the moving mirror in the projection objective;then,the performance of the proposed X-Y flexible adjusting mechanism is simulated and analyzed by using the finite element analysis method.The analysis results show that the adjustment stroke of the mechanism is greater than±20μm.The stiffness values in X direction and Y direction are 0.542μm/N,0.671μm/N,respectively;the ratio of the vertical coupling error to the displacement in the main direction is 6.86%and 4%,respectively;the mode is greater than 100 Hz.Finally,the performance test of the proposed adjustment mechanism is carried out,the repeated positioning accuracy in X direction and Y direction is 36.3 nm and 41.7 nm,respectively.During the adjustment process,the angle offset is less than 0.5".The experimental results show that the proposed flexible adjustment mechanism can meet the highprecision adjustment requirements of X-Y direction for image quality compensation of lithographic projection objective.

关 键 词：成像系统 光刻物镜 像质补偿 动镜 X-Y向调节机构 柔性铰链 

分 类 号：TH703[机械工程—仪器科学与技术]