X射线柱面反射镜的非零位干涉测量  

Non-Null Interferometric Test of X-Ray Cylindrical Reflect Mirror

作　　者：邓婷 刘锋伟[1] 覃蝶 徐燕[1] 吴永前[1] 陈强[1] Deng Ting;Liu Fengwei;Qin Die;Xu Yan;Wu Yongqian;Chen Qiang(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《光学学报》2022年第4期229-236,共8页Acta Optica Sinica

基　　金：国家自然科学基金(61905255)。

摘　　要：针对拼接干涉测量技术除了引入拼接误差,还将引入机械运动误差的问题,为此提出一种X射线反射镜的非零位干涉测量方法,无需拼接便可实现零回程误差的高精度干涉测量。利用一块高精度平面镜来标定干涉系统在全视场范围内的回程误差。通过将待测非球面镜划分成多个子孔径,每个子孔径可近似看作一个平面,这样可以从标定数据库中找到该子孔径所对应的回程误差,通过简单的矩阵拼接可得到整个待测非球面镜的回程误差。以X射线椭圆柱面反射镜为例进行实验,实现X射线椭圆柱面反射镜非零位干涉测量面形的回程误差有效标定,相比于拼接干涉测量方法二者结果一致性较好,证实所提方法的正确性。In this paper,a non-null interferometric measurement method of X-ray mirror is proposed,which can achieve high precision interferometric measurement of zero ratrace error without splicing.A high precision plane mirror is used to calibrate the ratrace error of the interference system in the full field of view.By dividing the aspherical mirror into several sub-apertures,each sub-aperture can be approximately regarded as a plane,so that the ratrace error corresponding to the sub-aperture can be found from the calibration database,and the ratrace error of the entire aspherical mirror can be obtained by simple matrix splicing.Taking the X-ray elliptic cylindrical mirror as an example,the ratrace error of the non-null interferometric surface shape of the X-ray elliptic cylindrical mirror is effectively calibrated.Compared with the splicing interferometric method,the results of the two methods are consistent,which confirms the correctness of the proposed method.

关 键 词：X射线光学 X射线镜 面形检测 回程误差 ZERNIKE多项式 

分 类 号：O436.1[机械工程—光学工程]