离子能量筛选器仿真设计  

Simulation Design of Ion Energy Filter

作　　者：张骏林 苏俊宏(导师)[1] 郭亮 李建超[1] 万文博[1] ZHANG Jun-lin;SU Jun-hong;GUO Liang;LI Jian-chao;WANWen-bo(School of Optoelectronic Engineering,Xi’an University of Technology,Xi’an 710021,China;North photoelectric Group Co.,Ltd,Xi'an 710065,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710021 [2]北方光电集团有限公司,陕西西安710065

出　　处：《光学与光电技术》2022年第1期108-114,共7页Optics & Optoelectronic Technology

基　　金：陕西省重点研发计划(2018KWZ-02)资助项目。

摘　　要：离子源作为一种离子束发射装置,常用于光学薄膜的制备中,但离子束中包含各种能量的离子,在光学薄膜制备过程中严重影响着薄膜成型后的微观结构和性能。针对目前国内外离子源普遍存在输出能谱过宽的缺点,以电磁场理论为基础,并对各能级的离子运动轨迹进行了仿真分析,设计了一种离子能量筛选器,仿真结果表明,经过筛选器筛选后能有效剔除过高和过低能量的离子,偏离中心离子能量负100 eV的筛选率,已达到82.24%,在光学薄膜制备领域中具有良好的应用前景。As an ion beam emitting device,ion source is often used in the preparation of optical films.However,the ion beam contains ions with various energy,which seriously affects the microstructure and properties of optical films.In view of the disadvantage that the output energy spectrum of ion sources at home and abroad is too wide,based on the electromagnetic field theory,the ion motion trajectories of each energy level are simulated and analyzed,and an ion energy filter is designed.The results show that the filter can effectively remove the ions with too high and too low energy,and the screening rate deviates from the central ion energy by negative 100eV,It has reached 82.24%,and has a good application prospect in the field of optical film preparation.

关 键 词：离子源 离子能量 筛选器 离子束辅助沉积 有限元仿真 

分 类 号：TN249[电子电信—物理电子学]