用于影像测量系统的V型梁模块的设计和研究  

Design and research of V-type beam module for image measurement system

作　　者：于海燕[1] 李宇[2] 张德贤[3] YU Haiyan;LI Yu;ZHANG Dexian(College of Information Engineering,Zhengzhou University of Science&Technology,Zhengzhou 450064,China;College of Electrical Engineering,Zhengzhou University of Science&Technology,Zhengzhou 450064,China;College of Information Science and Engineering,Henan University of Technology,Zhengzhou 450001,China)

机构地区：[1]郑州科技学院信息工程学院,河南郑州450064 [2]郑州科技学院电气工程学院,河南郑州450064 [3]河南工业大学信息科学与工程学院,河南郑州450001

出　　处：《传感器与微系统》2022年第5期23-26,30,共5页Transducer and Microsystem Technologies

基　　金：国家公共安全风险防控与应急技术装备重点专项项目(2018YFC0824402);河南省高等学校重点科研项目(21B880041)。

摘　　要：为了研究不同弯曲曲率对V型梁模块具有不同的影响,提出了以液晶高分子聚合物(LCP)柔性材料为衬底的V型梁弯曲的力学模型,并通过软件仿真和实验验证完成了柔性V型梁器件受弯曲曲率的影响。从对比结果可得,当柔性衬底的曲率从0逐渐增大到34.1 m^(-1)时,V型梁的驱动电流也随之增大,实测值与仿真值的最大误差低于3.70%,很好地揭示了柔性衬底弯曲曲率对V型梁模块的驱动性能产生的影响。研究的V型梁模块在自动影像测量系统上的线性吻合度基本可达100%,可满足自动影像测量的稳定可靠、精度高、抗干扰能力强等要求。In order to study the different effects of different bending curvature on V-beam module,a mechanical model of V-beam bending based on LCP flexible material is proposed,and the influence of bending curvature on flexible V-beam device is verified by software simulation and experiment.It can be seen from the comparison results that when the curvature of the flexible substrate gradually increases from 0 to 34.1 m^(-1),the driving current of the V-beam also increases,and the maximum error between the measured value and the simulation value is less than 3.70 %,which well reveals the influence of the bending curvature of the flexible substrate on the driving performance of the V-beam module.The linear coincidence of the V-beam module in the automatic image measurement system can basically reach 100 %.It can meet the requirements of stability,reliability,high precision and strong anti-interference ability of automatic image measurement.

关 键 词：微机电系统 弯曲曲率 柔性衬底 V型梁模块 力学特性 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]