基于纳米光栅泰伯效应的三轴加速度计仿真设计  

Simulation design of tri-axial accelerometer based on Talbot effect of nano-grating

作　　者：靳黎明 王策 金丽 辛晨光[1,2,3] 李孟委 JIN Liming;WANG Ce;JIN Li;XIN Chenguang;LI Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Nantong Institute of Intelligent Opto-Mechatronics,North University of China,Nantong 226000,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]中北大学南通智能光机电研究院,江苏南通226000 [3]中北大学前沿交叉科学研究院,山西太原030051

出　　处：《传感器与微系统》2022年第5期76-79,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金青年科学基金资助项目(62005253);山西省青年科技研究基金资助项目(201901D211277);山西省高等学校科技创新项目(2020L0267)。

摘　　要：基于纳米光栅近场泰伯自成像效应,提出一种双层光栅透射检测式的单片集成三轴微加速度计的设计方案,利用双层光栅的面内运动和离面运动分别对x,y,z轴加速度分别进行检测。通过对加速度计结构和双层纳米光栅结构尺寸分别进行仿真设计,并计算结构灵敏度和光学效应灵敏度的大小,完成了器件的优化设计与仿真研究。仿真结果表明:单片三轴微加速度计的面内检测灵敏度为1.67μm/g_(n),离面检测灵敏度为1.41μm/g_(n),结合纳米光栅光学效应的优化仿真,最终实现面内x,y轴加速度计灵敏度为0.038 V/g_(n),离面z轴加速度计灵敏度为0.406 V/g_(n)。Based on near-field Talbot self-imaging effect of nano-gratings,a single-chip integrated tri-axial micro-accelerometer with double-gratings transmission detection is proposed.The in-plane and out-of-plane movements of double gratings are used to detect the x,y and z axis accelerations respectively.By simulation designing on dimensions of the accelerometer structure and double-layer nano-grating structure respectively,and calculate the structural sensitivity and optimal sensitivity,the optimial design and simulation research of the accelerometer are completed.The simulation results indicate that the in-plane detection sensitivity is 1.67μm/g n,and the out-of-plane detection sensitivity is 1.41μm/g n.Combined with the optimization simulation of nano-grating optical effect,in-plane x and y axis accelerometer sensitivity of 0.038 V/g n,and the out-of-plane z axis accelerometer sensitivity of 0.406 V/g n are realized.

关 键 词：纳米光栅 泰伯效应 微加速度计 三轴单片集成 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]