晶圆制造设备的行业状况与发展策略  

Status and Development Strategy of Wafer Manufacturing Equipment Industry

作　　者：张晴晴 ZHANG Qingqing(Beijing Institute of Electronic Science and Technology Information,Beijing 100009,China)

机构地区：[1]北京市电子科技情报研究所,北京100009

出　　处：《集成电路应用》2022年第4期28-29,共2页Application of IC

摘　　要：阐述晶圆制造设备与半导体设备行业的发展,探讨中国晶圆制造设备行业的现状,面临困局与问题,提出应对的破局之策。This paper expounds the development of wafer manufacturing equipment and semiconductor equipment industry, discusses the current situation of China’s wafer manufacturing equipment industry, faces difficulties and problems, and puts forward some countermeasures.

关 键 词：晶圆制造 半导体设备 行业现状 

分 类 号：TN405[电子电信—微电子学与固体电子学]