制备方法对ZnO纳米薄膜微结构及光电性能的影响研究  

A Study of the Effect of Preparation Methods on the Microstructure and Optoelectronic Properties of ZnO Nano-films

作　　者：陈真英 李飞 CHEN Zhenying;LI Fei

机构地区：[1]北部湾大学理学院,广西钦州535011

出　　处：《科技创新与应用》2022年第17期19-22,共4页Technology Innovation and Application

基　　金：国家自然科学基金项目(51862031);全国大学生创新训练计划项目(201911607009);北部湾大学高层次人才科研启动项目(18KYQD50)。

摘　　要：本实验分别采用射频磁控溅射法和电子束蒸发法在普通玻璃衬底上制备ZnO薄膜样品,并对样品的外观形貌、微观形貌及结构、光电性能进行测试和表征。测试结果表明,磁控溅射制备的薄膜呈透明状,薄膜平整致密,晶粒比较大,缺陷浓度比较少,薄膜中晶粒沿ZnO(002)晶面择优取向生长,薄膜可见光区透过率达88.74%,但薄膜导电性能比较弱,且薄膜生长速率也比较小。而电子束蒸发制备的ZnO薄膜呈棕黄色,薄膜晶粒比较小,缺陷浓度比较大,薄膜中晶粒沿ZnO(102)晶面择优取向生长,薄膜在可见光区的透过率只有29.16%,但薄膜导电性能和生长速率大大超过磁控溅射的薄膜样品。另外,磁控溅射的薄膜样品纯度比较高,而电子束蒸发制备的样品中容易混入坩埚成分的杂质。The ZnO thin film samples were prepared on ordinary glass substrates by RF magnetron sputtering and electron beam evaporation respectively in this experiment,and the appearance,microstructure and photoelectric properties of the samples were tested and characterized.The test results show that the thin films prepared by magnetron sputtering are transparent,flat and dense,with relatively large grains and relatively small defect concentration.The grains in the thin films are preferentially oriented along the ZnO(002)crystal plane,and the transmittance of the visible light region of the film is 88.74%.But the electrical conductivity of the film is relatively weak,and the growth rate of the film is relatively small.However,the ZnO film prepared by electron beam evaporation is brown,the grain size of the film is relatively small,and the defect concentration is relatively high.The grains in the film grow preferably along the crystal plane of ZnO(102),and the transmittance of the film in the visible region is only 29.16%.However,the conductivity and growth rate of the film are much higher than those of the film samples deposited by magnetron sputtering.In addition,the purity of the thin film sample prepared by magnetron sputtering is relatively high,while the sample prepared by electron beam evaporation is easy to be mixed with the impurities of crucible composition.

关 键 词：ZnO纳米薄膜 磁控溅射 电子束蒸发 微观形貌及结构 光电性能 

分 类 号：O484[理学—固体物理]