632.8 nm单色光高反膜设计及性能研究  

Design and Properties of 632.8 nm High Reflection Film

作　　者：赵亚丽 孟宇 赵雁冰[1] 韩建新 ZHAO Ya-li;MENG Yu;ZHAO Yan-bing;HAN Jian-xin(Department of Materials Science and Engineering,Jinzhong University,Jinzhong Shanxi,030619,China;Department of Physics and Electronic Engineering,Jinzhong University,Jinzhong Shanxi,030619,China)

机构地区：[1]晋中学院材料科学与工程系,山西晋中030619 [2]晋中学院物理与电子工程系,山西晋中030619

出　　处：《晋中学院学报》2022年第3期59-63,108,共6页Journal of Jinzhong University

基　　金：山西省教育厅高等学校科技创新项目“表面等离子激元辅助TCO超表面热发射/吸收机理研究”(2020L0575);晋中学院博士基金启动项目“超冷原子气体中涡旋偶极子动力学研究”(jzxybsjjxm2019014);晋中市科技重大研发项目“多功能节能环保建筑玻璃的研发”(Y201027);山西省高等学校教学改革创新项目“用于构建学生知与智桥梁的AMRC项目式本科毕业论文模式的研究”(J2021652).

摘　　要：较金属薄膜,全介质反射薄膜具有低损耗和高反射的独特优势,可应用于激光器大幅度增强其激光强度.但全介质反射层结构复杂,涉及膜层材料、厚度和层数等.为了获得高反射薄膜设计方法,本论文针对632.8 nm单色光激光器高反射膜的需求,构建了硫化锌和氟化镁交替全介质高反射薄膜.采用TFCalc研究膜层材料膜厚、层数和入射角度等对其性能影响规律.研究表明:随膜层数增加,反射率相应提高.当层数为奇数层11层时,反射率效果最佳;在632.8 nm的单色光的照射下,初始膜系厚度分别设置为67.31 nm和114.63 nm,可满足激光器表面膜层高反射需求.在入射角度0°~40°范围内反射率均可实现99.5%~99.8%,可满足激光器表面膜层的性能要求.Compared to metal film,dielectric film has the unique advantages of low loss and high reflection.Dielectric film has extensive potential applications in laser system owing to greatly enhance the laser intensity.However,its structure is complex,involve such parameter as the membrane material,thickness and layers.In order to obtain design method of high reflection film and meet the high reflectivity at 632.8 nm,a dielectric film is proposed which is composed by zinc sulfide and magnesium fluoride film.In this paper,TFCalc was used to investigate the influence of the filer film structure on its spectral characteristics,such as film thickness,period number and incident angle.The results suggest that the reflectivity increases with the increase of the number of layers.The reflectivity of this dielectric film attain the optimum when the number of odd layers is 13 layers.In the presence of monochromatic light at 632.8 nm and their thickness is 67.31 nm and 114.63 nm respectively,the need of high reflection of laser surface layer can be met.The reflectivity can be as high as 99.5%~99.8%when the incident angle ranges from 0°to 40°,which can meet the performance requirements of the laser surface layer.

关 键 词：高反膜 膜厚 膜层数 入射角度 反射率 

分 类 号：O43[机械工程—光学工程]