约瑟夫森结工艺系统  

Josephson Junction Fabrication System

作　　者：熊康林[1,2] 冯加贵 夏慧枝 杨慧永 赵宇坤 陆书龙 张永红[1] XIONG Kang-lin;FENG Jia-gui;XIA Hui-zhi;YANG Hui-yong;ZHAO Yu-kun;LU Shu-long;ZHANG Yong-hong(Vacuum Interconnected Nanotech Workstation,Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China;GUSU Laboratory of Materials,Suzhou 215123,China)

机构地区：[1]中国科学院苏州纳米技术与纳米仿生研究所纳米真空互联实验站,江苏苏州215123 [2]材料科学姑苏实验室,江苏苏州215123

出　　处：《真空》2022年第2期1-5,共5页Vacuum

基　　金：江苏省科技计划自然科学基金(BK20180255);中国科学院青年创新促进会(2019319);中国科学院苏州纳米技术与纳米仿生研究所自有课题(Y9AAD110);中国科学院科研仪器设备研制项目(YJKYYQ20200073)。

摘　　要：超导电子学和超导量子信息等领域的核心元器件是约瑟夫森结,这是一种超导体/介质层/超导体三层结构的非线性器件。超导量子比特常用铝/氧化铝/铝结构的结,在量子芯片上制备这种约瑟夫森结,需要在衬底不离开真空环境的条件下,实施离子束刻蚀、样品方位角可调的电子束蒸发、气氛可控氧化等工艺过程。自主研发的约瑟夫森结工艺系统是一套集成了三个工艺腔室的超高真空系统,样品可以自动在不同腔室中传输并完成三种工艺过程,系统的工艺性能经过了验证。Josephson junction is the key electrical element in superconductive electronics and quantum information. It is a type of non-linear device composed of two superconductors separated by a thin dielectric. Most superconducting qubits use the Al/AlOx/Al junction. The fabrication of such junctions on quantum chips involves ion beam etching, electron beam evaporation with adjustable sample orientation, and controllable oxidation. The samples should not leave the vacuum during the fabrication process.The homemade Josephson junction processing system is a ultra high vacuum system with three processing chambers. Samples can be automatically transferred between the chambers to complete the fabrication. The processing steps of the system have been experimentally verified.

关 键 词：超导电路 约瑟夫森结 离子刻蚀 电子束蒸发 

分 类 号：TN305.8[电子电信—物理电子学]