衬底加热温度对WC-DLC涂层结构和摩擦磨损性能的影响  

Effect of Substrate Heating Temperature on Structure and Frictional Properties of WC-DLC Coatings

作　　者：贾东旭 刘星 孙刚 马国佳 JIA Dongxu;LIU Xing;SUN Gang;MA Guojia(AVIC Manufacturing Technology Institute,Aviation Key Laboratory of Science and Technology on Advanced Surface Engineering,Beijing 100024,China)

机构地区：[1]中国航空制造技术研究院先进表面工程技术航空科技重点实验室,北京100024

出　　处：《真空科学与技术学报》2022年第5期364-370,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：采用中频磁控溅射和电弧离子镀复合工艺,在316L不锈钢基体上制备WC掺杂的类金刚石涂层,通过相组织结构分析、硬度测试和摩擦磨损试验,研究了衬底加热温度分别为150℃、250℃、350℃和450℃时对类金刚石薄膜结构和摩擦磨损性能的影响。研究表明:DLC薄膜中的W元素相对含量随衬底温度升高略有增多,最大为3.45%,且掺杂物主要WC;和W_(1-x)C两种晶体相存在,衬底温度升高,晶体结构由WC1-x转变为W_(1-x)C;150℃时薄膜中sp;C键含量最多,纳米硬度值也最大为7.4GPa,衬底温度的升高使薄膜结构发生变化,力学性能也变差;干摩擦试验2 N载荷下,摩擦系数随温度的升高先降低后升高,350℃时,摩擦系数为0.2,而磨损率随加热温度逐渐增大,150℃时最小为3.45×10;m^(3)/N·m,磨损方式为磨粒磨损。By intermediate frequency magnetron sputtering and arc ion plating technology,WC doped diamond-like coatings were prepared on 316L stainless steel substrates,which were heated to 150℃,250℃,350℃and 450℃,respectively.The influence of the heating temperature on the structure and tribological performance of diamond-like films was studied through phase structure analysis,hardness test,and friction and wear test.The results show that the doping element amount of W in DLC films increases slightly with the increase of substrate temperature,and the maximum doping amount is 3.45%.There are mainly two crystal phases,WC;and W_(1-x)C,and the crystal structure changes from WC;to W_(1-x)C as the temperature increases.At 150℃,the content of sp~3C bond in the film is the highest,and the nano-hardness value is up to 7.4 GPa.The increase of substrate temperature changes the structure of the film,and the mechanical properties become worse.Under 2 N load of dry friction test,the friction coefficient decreases first and then increases with the increase of temperature.At 350℃,the friction coefficient is 0.2,which is the minimum one,while the wear rate increases gradually with the heating temperature.At 150℃,the minimum is 3.45×10;m~3/N·m,and the wear mode is abrasive wear.

关 键 词：中频磁控溅射 加热温度 WC-DLC涂层 磨损率 

分 类 号：TB742[一般工业技术—材料科学与工程]